Micro sensor for detecting hepatic fibrosis based on method of antibody and antigen
A technology of micro-sensors and liver fibrosis, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of high cost, unreliability, cross-contamination detection results, etc., achieve accuracy improvement, reduce measurement error, and facilitate The effect of mass production
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[0020] The present invention is further described by the following examples.
[0021] The micro-sensor is made by the lift-off method after evaporation (the gold electrode is also used for the counter electrode). It can also be prepared by sputtering instead of evaporation, and etching instead of lift-off.
[0022] a. Wash the silicon wafers with No. 1 and No. 2 liquids, rinse with deionized water, and dry.
[0023] b. Thermally grown 300nm SiO 2 .
[0024] c. Photoetch the required working electrode and counter electrode patterns, such as figure 1 with figure 2 Shown. There are six working electrodes 3 arranged symmetrically on both sides, with a diameter of 1 mm and a spacing of 200 microns. The spacing between the working electrode 3 and the reference electrode 1 is 200 microns, and the spacing between the reference electrode 1 and the counter electrode 2 is also 200 microns.
[0025] d. Evaporate the titanium layer to a thickness of about 20nm, and then evaporate gold to a t...
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