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Apparatus for manufacturing flat display

A flat-panel display and manufacturing equipment technology, applied in semiconductor/solid-state device manufacturing, instruments, electrical components, etc., can solve problems such as unused load lock chambers

Inactive Publication Date: 2008-08-06
ADVANCED DISPLAY PROCESS ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] Although a plurality of process chambers 300 can be used for one feed chamber 200 to reduce the area occupied by one FPD manufacturing apparatus, as Figure 4 and 5 As shown, this method also involves a problem that there is unused space around the load lock chamber 100

Method used

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  • Apparatus for manufacturing flat display
  • Apparatus for manufacturing flat display
  • Apparatus for manufacturing flat display

Examples

Experimental program
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Effect test

no. 1 example

[0040]refer to Figure 4 Or 5, illustrates the FPD manufacturing equipment according to the first embodiment of the present invention. Such as Figure 4 or as shown in 5, the FPD manufacturing equipment includes such as Figures 1 to 3 The load lock chamber 100 and the feed chamber 200 are shown in the conventional case. The FPD fabrication facility also includes at least one process chamber 300 operatively connected to the feed chamber 200 , preferably at least two process chambers 300 . exist Figure 4 In the example of , two processing chambers 300 are provided. exist Figure 5 In the example of , three processing chambers 300 are provided. The load lock chamber 100 includes a plurality of gates arranged in pairs, such as Figure 6 shown in . In the example shown, a gate pair comprising two gates 110 and 120 is included in the load lock chamber 100 .

[0041] The substrate inlet 130 is formed at one side wall of the load lock chamber 100 opposite to the feed chambe...

no. 2 example

[0056] refer to Figure 10 Or 11, illustrates the FPD manufacturing equipment according to the second embodiment of the present invention. Such as Figure 10 As shown in or 11 , the FPD manufacturing facility includes a load lock chamber 100 and a feed chamber 200 . The FPD manufacturing apparatus also includes at least one process chamber 300 , preferably at least two process chambers 300 , which are operatively connected to the feed chamber 200 . exist Figure 10 In the example of , two processing chambers 300 are provided. exist Figure 11 In the example of , three processing chambers 300 are provided.

[0057] The substrate supporting unit 160 is disposed at one side of the load lock chamber 100 such that the substrate supporting unit 160 extends into or retracts from the load lock chamber 100 through one side wall of the load lock chamber 100 opposite to the feed chamber 200 . Corresponding to this extension and retraction, the substrate supporting unit 160 loads an...

no. 3 example

[0071] refer to Figure 14 , illustrates an FPD manufacturing apparatus according to a second embodiment of the present invention. Such as Figure 14 As shown in , the FPD manufacturing apparatus includes a load lock chamber 100 , a feed chamber 200 and a process chamber 300 . The substrate support units 160 are respectively provided at the sides of the load lock chamber 100 adjacent to the side walls of the load lock chamber 100 connected to the feed chamber 200 so that each substrate support unit 160 is connected to the load lock chamber 200 by connecting to the feed chamber 200. The side walls of the chamber 100 extend into or retract from the load lock chamber 100 adjacent to the side walls of the load lock chamber 100 . The FPD manufacturing equipment also includes a substrate feeding device 600 for loading a substrate S on each substrate support unit 160 ( Figure 17 ) and unload the substrate S from the substrate support unit 160.

[0072] Each substrate supporting ...

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PUM

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Abstract

A flat-panel display (FPD) manufacturing apparatus having an improved structure capable of reducing the time taken to load a substrate into a load lock chamber and to unload the substrate from the load lock chamber, thereby effectively processing large-size substrates.

Description

technical field [0001] The invention relates to an apparatus for manufacturing flat panel displays. Background technique [0002] refer to figure 1 and 2 , illustrating a general flat panel display (FPD) manufacturing facility. The FPD manufacturing apparatus includes a load lock chamber 100, a feed chamber 200, and a process chamber 300, which are connected in series to process substrates for FPDs. [0003] The load lock chamber 100 is connected to an external station to receive a substrate to be processed in the FPD manufacturing apparatus for loading the substrate, or to discharge a substrate that has been completely processed in the FPD manufacturing apparatus for unloading the substrate. The load lock chamber 100 is repeatedly switched between a vacuum state and an atmospheric state, thereby selectively communicating the load lock chamber 100 with an external station. [0004] The feed chamber 200 is connected between the load lock chamber 100 and the processing cha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G09F9/00H01L21/67
Inventor 李荣钟崔浚泳曹生贤安成一
Owner ADVANCED DISPLAY PROCESS ENG
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