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Method for data pre-population

A pre-populated, data technology, applied in the field of data management, which can solve problems such as data not being fully used

Inactive Publication Date: 2010-01-20
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Processing tools are often not connected to the APC system, and the data on the processing tool is not fully used

Method used

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  • Method for data pre-population
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  • Method for data pre-population

Examples

Experimental program
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Embodiment Construction

[0013] figure 1 An exemplary block diagram of an APC system in a semiconductor manufacturing environment according to one embodiment of the invention is shown. In the illustrated embodiment, semiconductor manufacturing environment 100 includes at least one semiconductor processing tool 110 , at least one process module 120 , sensor 130 , sensor interface 135 , and APC system 105 . APC system 105 may include interface server (IS) 150 , APC server 160 , client workstation 170 , GUI component 180 , and database 190 . In one embodiment, IS 150 may include a real-time memory database, which may be considered a "Hub."

[0014] In the illustrated embodiment, a single tool 110 is shown along with a single process module 120, but this is not necessary to the invention. APC system 105 can interface with a number of processing tools including cluster tools containing one or more process modules. For example, tools and process modules may be used to perform etch, deposit, diffuse, clea...

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Abstract

Described is a method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.

Description

[0001] This international application is based upon and claims the benefit of the filing date of US Provisional Application No. 60 / 474,226, filed May 30, 2003, the entire contents of which are hereby incorporated by reference. technical field [0002] The present invention relates to data management in semiconductor processing systems, and more particularly, to methods of managing data using data pre-population techniques. Background technique [0003] During various stages of plasma processing, such as semiconductor or display manufacturing, key process parameters can vary widely. Processing conditions change over time, where the slightest change in critical process parameters can produce undesired results. Small changes in the composition or pressure of etchant gases, process chamber or wafer temperature can easily occur. [0004] Measuring and monitoring these process parameters at a given moment allows useful data to be accumulated and analyzed. Process control feedbac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418G05B9/02G05B11/01G05B19/00
CPCG05B2219/31288G05B19/4183Y02P90/02G05B19/00
Inventor 詹姆斯·E·威利斯原田智爱德华·C·胡弥三世詹姆斯·E·克雷克特卡
Owner TOKYO ELECTRON LTD