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Method for measuring mark position in minitype flat-bed printing derivation equipment system

A technology of deflectors and measuring points, which is applied in the direction of instruments, photographic process of patterned surface, optics, etc., can solve the problems such as the method of changing the thickness of objects that have not been disclosed, and achieve the effect of good accuracy

Inactive Publication Date: 2008-06-25
MICRONIC LASER SYST AB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0020] Furthermore, no method of compensating for object thickness variations when measuring the coordinates of arbitrarily shaped patterns arranged on the surface of an object in a deflector system for calibration purposes has not been disclosed

Method used

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  • Method for measuring mark position in minitype flat-bed printing derivation equipment system
  • Method for measuring mark position in minitype flat-bed printing derivation equipment system
  • Method for measuring mark position in minitype flat-bed printing derivation equipment system

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Embodiment Construction

[0043] So far we have only used this method to measure along the direction of the microsweep, ie in one dimension. But the method can be extended to measure in two dimensions. When we do this, we are actually producing an image of the pattern we measured.

[0044] When we talk about an image, we usually think of it as a set of pixels. (Each pixel has a certain "gray level" that describes the brightness of that pixel).

[0045] When dealing with CCD images, each pixel is fixed at a position within a raster (or grid). When analyzing a CCD image to find the location of edges, both pixel location information and gray levels must be used. Different straightforward methods can be used to estimate the location of edges in an image. The accuracy of the position estimate depends on the calibration of the CCD array, i.e. where the pixels are located in the array, how sensitive they are to light, and how well we can place the image on the array without any distortion. The light dist...

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Abstract

The present invention relates to a method for determining the coordinates of an arbitrarily shaped pattern in a deflector system. The method basically comprises the steps of: moving the pattern in a first direction (X), calculating the position of the edge of the pattern by counting the number of micro sweeps, performed in a perpendicular direction (Y), until the edge is detected, determining a correction function for the surface reflecting variations in a third direction (Z) perpendicular to both the first (X) and the second (Y) directions, and determining the coordinates by relating the number of counted micro sweeps to the speed of the movement of the pattern using the correction function to compensate for variations in the third direction. The invention also relates to software implementing the method.

Description

technical field [0001] The invention relates to a method for determining the coordinates of an arbitrarily shaped pattern on a surface in a deflector system, as defined in claims 1 and 14 . The invention also relates to software implementing said method for determining the coordinates of an arbitrarily shaped pattern on a surface in a deflector system, as defined in claim 22 . Background technique [0002] Methods for measuring time in deflector systems have been used for many years. There has been little modification in the algorithm so far. Only the patterns used for different kinds of calibrations have changed over the years. We now obtain experimentally validated repeatability of the method in the range of 10-15 nm on a surface of 800 x 800 mm. Here 10-15nm means the covered part of the measurement. [0003] A disadvantage of the method used is that we are currently only able to measure in the same direction as the micro sweep. So in order to measure the X coordinat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F9/00
CPCG03F7/70783G03F7/70625G03F7/70508G03F7/70358
Inventor 彼得·埃克伯格
Owner MICRONIC LASER SYST AB