Liquid medicine confecting device capable of improving liquid medicine confecting efficiency and confecting method
A technology of liquid medicine and high efficiency, which is applied in the direction of chemical instruments and methods, mixer accessories, dissolution, etc., can solve the problems of reducing the service life of the drive device, not being able to know the exact concentration of the original solution, and difficult to liquid medicine, etc., to improve the service life, Improve the preparation efficiency and avoid the effect of frequent start and stop
Active Publication Date: 2008-09-10
SEMICON MFG INT (SHANGHAI) CORP
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[0008] The above solution preparation method is difficult to pass once because there is no stock solution concentration provided by the raw material supplier on the stock solution barrel, so it is impossible to know the exact concentration of the stock solution in the stock solution tank To obtain the target concentration and target volume of liquid medicine after preparation, it is necessary to start and stop the drive device many times, which greatly reduces the service life of the drive device, and also causes the preparation time to be too long
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[0024] The medicinal solution preparation device and the medicinal solution preparation method of the present invention which can improve the preparation efficiency of the medicinal solution will be further described in detail below.
[0025] The medicinal solution preparation device capable of improving the preparation efficiency of the medicinal solution of the present invention is used to prepare a medicinal solution with a target concentration and a target volume using the stock solution in the stock solution barrel, the stock solution barrel is equipped with a stock solution of a standard volume, and the stock solution The barrel has a concentration mark for identifying the concentration of the stock solution in the stock solution barrel.
[0026] In this embodiment, the concentration is marked as a weight concentration value ranging from 24.90% to 25.30%, the target concentration is 2.37%, the target volume is 1000 liters, and the chemical solution is a developing solutio...
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The invention relates to a liquid medicine preparing device and a method which can improve liquid medicine preparing efficiency. The existing liquid medicine preparing device and the method thereof can not prepare the needed liquid medicine by one time. The liquid medicine preparing device of the invention includes a primary liquid trough, a liquid medicine preparing slot, a water supply unit, a first drive device, a second drive device, a storage unit, a capturing unit, a calculating unit and a control module. The liquid medicine preparing method of the invention firstly stores the target concentration and the target volume of the liquid medicine to be prepared and captures the concentration mark of each primary liquid bucket, then calculates the liquid medicine concentration in the primary liquid trough according to the captured concentration mark, then generates a control signal according to the calculated liquid medicine concentration and the stored target concentration and the target volume as well as outputs the control signal to the second drive device and the water supply unit for driving the primary liquid and water with a corresponding amount to a liquid medicine preparing slot. The liquid medicine preparing efficiency can be greatly improved by adopting the liquid medicine preparing device and the method of the invention.
Description
technical field [0001] The invention relates to the preparation of medicinal liquid, in particular to a medicinal liquid preparation device and a preparation method which can improve the preparation efficiency of medicinal liquid. Background technique [0002] In the field of semiconductor manufacturing, after the pattern on the photomask is transferred to the photoresist through the photolithography process, the pattern needs to be developed with a developer. In order to ensure the normal progress of the development process, the developer needs to be replaced regularly, so the semiconductor Manufacturing companies have a great demand for developer, and the amount of developer (with a concentration of 2.37%) for an 8-inch semiconductor production line can reach 8,000 liters a day. [0003] However, raw material suppliers usually do not provide a developer solution with a concentration of 2.37%, but a stock solution with a concentration of 25%. The stock solution with a conc...
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Inventor 张云秀徐鸣姜红光秦骏延
Owner SEMICON MFG INT (SHANGHAI) CORP