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AMHS system for integrated circuit production line and implementing method thereof

A technology of integrated circuit and implementation method, applied in the direction of electrical program control, comprehensive factory control, comprehensive factory control, etc., can solve the problem of long waiting time for instructions, and achieve the effects of shortening waiting time for instructions, shortening TAT time, and low cost

Active Publication Date: 2009-04-22
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

[0007] However, none of the above methods can effectively solve the problem that the command waiting time is too long

Method used

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  • AMHS system for integrated circuit production line and implementing method thereof
  • AMHS system for integrated circuit production line and implementing method thereof

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0019] Such as figure 2 As shown, the present invention is figure 1 In the traditional AMHS system shown, a communication monitoring computer (ie communication monitoring terminal) is added between the STOCKER main control computer and the ONLINE terminal (FCT-STC). The HOST host system (03-ALPS / FLC) is connected to the ONLINE terminal through a local area network (such as Ethernet based on TCP / IP, IPX, etc.). Between ONLINE terminal (FCT / CT1) and EQ (production equipment), between ONLINE terminal (FCT / AGV) and AGVC (the main control computer of AGV, which controls AGV through infrared communication), between ONLINE terminal (FCT / STC) and STOCKER main control computers are connected through LAN or serial port (such as SECS1 / SECS2 protocol based on RS232). Infrared communication is usually used between AGV, STOCKER and EQ. The charger and ...

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PUM

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Abstract

The invention discloses an AMHS used in a production line of an integrated circuit. Control information of the AMHS is monitored in a real-time manner by adding a communication monitoring terminal between a main control computer of an automatic storage cabinet and an ONLINE terminal of the AMHS; related control and state information is modified or added to be sent according to a running state of the system; and amount of handling commands from a host computer system is controlled within a reasonable range. Furthermore, the invention also discloses a method for achieving the AMHS. The AMHS and the method have low cost and less risks, improve the handling efficiency, and shorten the waiting time of the handling commands. After the proposal is implemented, the average scheduling time of products is shortened by more than 30%, the TAT (product production period) is shortened by about 13%, and the yield is increased by about 11.8% under the same inventory condition.

Description

technical field [0001] The present invention relates to an automatic control system, in particular to an AMHS system (Automatic Material Handling System, automatic logistics system) used in an integrated circuit production line; in addition, the present invention also relates to a method for realizing the aforementioned AMHS system used in an integrated circuit production line . Background technique [0002] Such as figure 1 As shown, the traditional AMHS system used in the integrated circuit production line includes the HOST mainframe system (the central computer control system of AMHS, which is usually composed of multiple servers and is used for automatic control and operation management of the production equipment and process flow of the whole factory. ), ONLINE terminal (the communication terminal of the factory automation system, figure 1 FCT / CT1, FCT / AGV, and FCT / STC are all ONLINE terminals), STOCKER (automatic storage cabinet, used for storage and scheduling of pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 周百钧
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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