Active vibration isolation control platform

Abstract

The invention discloses an active vibration isolation control platform. The active vibration isolation control platform comprises an active vibration isolation device and an active vibration isolation controller; the active vibration isolation device comprises a lower platform, a midbody and an upper platform; a voice coil motor actuator is arranged between the midbody and the lower platform; a linear variable differential transformer type displacement sensor is arranged between the upper platform and the midbody; and two three-freedom-degree acceleration sensors are arranged on the upper platform and the lower platform respectively. The vibration isolation controller is designed according to a master-slave open type control structure and consists of an upper control computer and a lower execution controller, wherein the upper control computer is a mainframe of an embedded type industrial control computer PC/104; and the lower execution controller is an open-type controller. The active vibration isolation control platform is quite effective on low-frequency vibration isolation and is applicable to precise manufacture, precise measurement, aerospace application and other vibration isolation fields with special requirement on vibration environment.

Description

technical field [0001] The invention relates to an active vibration isolation control system, in particular to an active vibration isolation control platform based on a voice coil motor. Background technique [0002] With the development of precision machining, precision measurement technology and aerospace technology, the adverse effects of inevitable vibration phenomena in electromechanical systems on product processing accuracy, measurement accuracy and payloads on spacecraft have become increasingly prominent. For example, in the manufacturing process of integrated circuits, precision mechanical processing devices and measuring instruments are very sensitive to micron-level micro-vibrations, so that small vibrations will affect the processing accuracy of chips, shorten the life of mechanical equipment, and even affect the entire The system is severely damaged. For another example, for a camera on a satellite used to capture ground objects, a slight shake of the spacecra...

AI Technical Summary

Problems solved by technology

Among them, the main disadvantages of piezoelectric actuators are small driving force and small deformation.

The disadvantages of pneumatic / hydraulic actuators are large volume, heavy weight, complex auxiliary equipment, large time lag, and low control accuracy, so they are not suitable for precision vibration isolation occasions

Magnetostrictive actuators are more suitable for high-frequency, high-power vibration isolation applications, but they are very expensive

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