Dual testing room measured material outgassing rate measuring device and method
A test room and double test technology, applied in the preparation of test samples, analysis materials, instruments, etc., can solve the problems that cannot eliminate the influence, complex structure, etc., and achieve the effect of improving the vacuum degree, facilitating baking, and eliminating the influence
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0043] Below in conjunction with accompanying drawing of description, the present invention is described in detail:
[0044] The device of double testing room of the present invention to measure material outgassing rate is as figure 1As shown, it includes high vacuum chamber 12, symmetrical test chamber A8 and test chamber B9, ultra-high vacuum chamber 2, separation gauge 7, ultra-high vacuum angle valves 5, 6, two straight-through valves 10 and 11, bimolecular pump pumping Gas system 1, the interface is all sealed with metal, which is resistant to high temperature baking. The bimolecular pump pumping system 1 is directly connected to the ultra-high vacuum chamber 2; the ultra-high vacuum chamber 2 communicates with two symmetrical test chambers A8 and B9 respectively through small holes, and the diameter of the small holes is 8.1mm. The design can make the flow conductance of the small hole 6L / s; the separation gauge 7 is bridged on the ultra-high vacuum chamber 2 and the te...
PUM
Property | Measurement | Unit |
---|---|---|
Diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap