Electrothermal-driven in-plane bistable radio frequency microswitch

An electrothermal drive, bistable technology, applied in the direction of generators/motors, TV system components, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., can solve the problem of very high accuracy requirements and device fatigue life impact, unsuitability and other issues, to achieve the effect of meeting planar production and application, reducing switching power consumption, and occupying a small space
CN101719575BInactive Publication Date: 2012-08-29SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI JIAO TONG UNIV
Publication Date
2012-08-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to an electrothermal-driven in-plane bistable radio frequency microswitch belonging to the technical field of micro electromechanics. The electrothermal-driven in-plane bistable radio frequency microswitch comprises an electrothermal-driven mechanism, a mechanical locking mechanism and a signal conversion mechanism, wherein the electrothermal-driven mechanism is positioned under the mechanical locking mechanism; and the mechanical locking mechanism is connected with the signal conversion mechanism. The invention can realize the mechanical locking by using a pair of locking contacts, does not require continuous power consumption when keeping in a stable state, also fully develops the advantages of large driving force, high displacement power density and convenient integrated manufacture of an electrothermal driver and can be used as the actuation form of the mechanical locking structure of the switch. The switch has simple structure, foreseeable radio frequency (RF) characteristic, possibility of batch manufacture and practical application and suitability for integral manufacture.
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Description

technical field

[0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to an in-plane bistable radio frequency micro-switch driven by electrothermal. Background technique

[0002] In recent years, radio frequency microelectromechanical system technology (RF MEMS) has shown great potential in both civilian and military applications, and one of the most important fields is RF MEMS switches. As far as the current common switches are concerned, semiconductor switches mainly composed of transistors and diodes have low power capacity and high resistance loss, and the speed of further increase in cut-off frequency is gradually slowing down; electromechanical switches have large power capacity, but large power consumption. Works rather slowly and only works on low frequencies. The RF MEMS switch not only combines the advantages of semiconductor switches and mechanical switches, but also overcomes their shortcomings; the re...

Claims

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