The invention relates to a flexible thin film
radio frequency switch which comprises a substrate. The substrate is a flexible substrate, a SU8
adhesive layer is arranged on the substrate, and a first
PIN diode, a second
PIN diode, an input end, an output end and a ground terminal are respectively arranged on the upper surface of the SU8
adhesive layer, wherein one end of the first
PIN diode is connected with the input end by a
metal interconnection line; the other end of the first PIN
diode is respectively connected with the output end and one end of the second PIN
diode by
metal interconnection lines; and the other end of the second PIN
diode is connected with the ground terminal by a
metal interconnection line. The invention provides the switch which is developed by combining a thin film transfer process and utilizing the flexible PIN diodes and can be applied to the field of flexible
radio frequency. A production process of the flexible thin film
radio frequency switch disclosed by the invention is completely compatible to a flexible
thin film diode, the PIN diodes and the like. The flexible thin film radio frequency can be applied to numerous
wireless portable devices, such as a
mobile phone and a
radar system. By
combined use of the monocrystal
silicon thin film transfer process, the switch with a low parasitic resistance and a high radio
frequency characteristic is implemented.