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49results about How to "Improve RF characteristics" patented technology

GaN (Gallium Nitride) HEMT (High Electron Mobility Transistor) device and preparation method thereof

The invention discloses a GaN (Gallium Nitride) HEMT (High Electron Mobility Transistor) device and a preparation method thereof. The GaN HEMT device comprises an N-type cap layer, a first passivationlayer and a first dielectric layer, wherein a gate metal region is penetrated in the middle parts of the N-type cap layer, the first passivation layer and the first dielectric layer; a second passivation layer is formed in the gate metal region and covers the lateral surfaces of the N-type cap layer, the first passivation layer and the first dielectric layer exposed in the gate metal region and apart of the upper surface of a barrier layer; a second dielectric layer is formed in the gate metal region and is superposed on the second passivation layer; a gate metal layer covers the residual upper surface of the barrier layer exposed in the gate metal region, the second passivation layer and the second dielectric layer; and the second passivation layer and the second dielectric layer are superposed at two sides of the gate metal layer. The N-type cap layer is adopted to reduce the parasitic resistance of a source and a drain, and a lateral wall process is adopted to manufacture the second passivation layer and the second dielectric layer which are superposed at two sides of the gate metal layer to reduce the gate length size and reduce the parasitic capacitance, thereby obtaining the GaN HEMT device with excellent radio frequency characteristics.
Owner:WAYTHON INTELLIGENT TECH SUZHOU CO LTD

Flexible thin film radio frequency switch

The invention relates to a flexible thin film radio frequency switch which comprises a substrate. The substrate is a flexible substrate, a SU8 adhesive layer is arranged on the substrate, and a first PIN diode, a second PIN diode, an input end, an output end and a ground terminal are respectively arranged on the upper surface of the SU8 adhesive layer, wherein one end of the first PIN diode is connected with the input end by a metal interconnection line; the other end of the first PIN diode is respectively connected with the output end and one end of the second PIN diode by metal interconnection lines; and the other end of the second PIN diode is connected with the ground terminal by a metal interconnection line. The invention provides the switch which is developed by combining a thin film transfer process and utilizing the flexible PIN diodes and can be applied to the field of flexible radio frequency. A production process of the flexible thin film radio frequency switch disclosed by the invention is completely compatible to a flexible thin film diode, the PIN diodes and the like. The flexible thin film radio frequency can be applied to numerous wireless portable devices, such as a mobile phone and a radar system. By combined use of the monocrystal silicon thin film transfer process, the switch with a low parasitic resistance and a high radio frequency characteristic is implemented.
Owner:TIANJIN UNIV

Radiofrequency LDMOS (laterally diffused metal oxide semiconductor) device and manufacturing method thereof

The invention discloses a radiofrequency LDMOS (laterally diffused metal oxide semiconductor) device. Drift regions are uneven doping structures; a first drift region, a third drift region and a second drift region are sequentially arranged between a channel and a drain region; the doping concentration of the first drift region is minimum, the strength of an electric field nearby a channel region and a hot carrier effect can be reduced, and the reliability of the device is improved; the doping concentration of the second drift region is high, and the switch-on resistance of the device can be reduced; and by a contra-doping covering layer formed on the surface of the second drift region, the drift regions can run out effectively, the outputting capacitance of the device is reduced, influences of charge and an interface state of shielding dielectric layer without a Faraday shield layer can be avoided, and the characteristics of the device are stable. The second drift region is a transition region, and the driving current of the device can be increased further and the switch-on resistance of the device can be reduced under the condition that the reliability and the outputting capacitance of the device are not affected. The invention also discloses a manufacturing method of the radiofrequency LDMOS device.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Semiconductor device and method of forming the same

The invention provides a semiconductor device and a forming method thereof. The forming method of the semiconductor device includes: providing first and second wafers; forming a plurality of trenches; forming a first oxide layer on the second wafer; The circle is bonded to the first wafer, the first wafer is used as the substrate of the semiconductor device, the first oxide layer is used as the buried oxide layer, and the second wafer is used as the top silicon for forming the device. The semiconductor device includes: a substrate; a second oxide layer located on the surface of the substrate; a first oxide layer; the first and second oxide layers together form a buried oxide layer; a first side of the substrate opposite to the buried oxide layer There are a plurality of trenches; the semiconductor device also includes a top layer of silicon formed on the buried oxide layer. The beneficial effect of the present invention is that the carriers accumulated on the surface of the substrate close to the buried oxide layer will be blocked by the trench, reducing the impact of the carriers on the capacitance, thereby reducing the variable capacitance of the interface under the buried oxide layer. With the amount of change, the radio frequency characteristics of the semiconductor device are improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Radio frequency testing switch of flowing terminal

The invention discloses a flowing terminal radio frequency testing switch, including a first terminal (500), a second terminal (600), a casing (700) which is used for containing the first terminal (500) and the second terminal (600) and an outer casing (800) around the casing (700). The flowing terminal radio frequency testing switch is characterized in that the first terminal (500) includes a first vertical slab (510), an elastic backing block (520) which is inflected at the lower half part of the first vertical slab (510), a connecting port joining component (530) which is formed by inflecting the elastic backing block (520) upwardly to be zigzag, a first joining block (540) which is formed by extending forward from the connecting port joining component (530) and a first support plate (550) which is inflected backward at the end of the lower part of the first vertical slab (510); the second terminal (600) includes a second vertical slab (610), a second support plate (650) which is extended laterally from the second vertical slab (610), and a second joining block (640) which is extended upwardly from the end of the upper part of the second vertical slab (610); the thickness of the first terminal (500) is 0.1mm to 0.12mm; the width of the elastic backing block (520) is 0.5mm to 0.6mm; the total height after the combination of the first terminal (500), the second terminal (600), the casing (700) and the outer casing (800) is 2.45mm to 2.5mm; one edge of the end of the upper part of the second joining block (640) of the second terminal (600) is a chamfered edge; the width of the second joining block (640) is 0.4mm to 0.5mm; the surface of the outer casing (800) is formed by firstly coating a nickel coating (910) which is made from sulfamic acid and 1micron to 2 microns thick and a gold coating (920) which is 0.08 micron to 0.2 micron thick in turn and then being pressed.
Owner:德菱机电有限公司

Deep trench filling structure and fabrication method thereof

The invention provides a deep groove filling structure and a manufacturing method of the deep groove filling structure. The manufacturing method includes the steps of providing a substrate, sequentially forming a buried oxide layer and a semiconductor layer which are located on the substrate, forming lateral walls on the lateral wall body of the buried oxide layer and the lateral wall body of the semiconductor layer, using the lateral walls as masks, removing partial substrate materials in contact with the buried oxide layer in the substrate direction, forming a groove defined by the remain substrate, the buried oxide layer and the lateral walls, forming an intrinsic semiconductor layer in the groove, and forming an isolation structure at the position, where the the intrinsic semiconductor layer is formed, of the groove. The deep groove filling structure comprises the substrate, the buried oxide layer and the semiconductor layer, and the buried oxide layer and the semiconductor layer are sequentially located on the substrate. The groove extending to the position below the semiconductor layer is formed in the lateral wall of the substrate, and the intrinsic semiconductor layer is arranged in the groove. According to the deep groove filling structure and the manufacturing method of the deep groove filling structure, the output signal distortion problem can be solved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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