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Electrothermal-driven in-plane bistable radio frequency microswitch

An electrothermal drive, bistable technology, applied in the direction of generators/motors, TV system components, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., can solve unsuitable, very high precision requirements, Issues such as the impact of device fatigue life, to achieve the effect of small footprint, satisfying planar production and application, and reducing switching power consumption

Inactive Publication Date: 2010-06-02
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

Although this design seems simple, it is obviously not suitable for the use of micromachining technology to achieve integrated manufacturing, and the assembly accuracy is very high; in addition, the cantilever beam has been under stress in the initial state, and the fatigue of the device Lifespan is greatly affected

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  • Electrothermal-driven in-plane bistable radio frequency microswitch
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  • Electrothermal-driven in-plane bistable radio frequency microswitch

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Embodiment Construction

[0017] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

[0018] Such as figure 1 As shown, this embodiment includes: main driver electrode 1, electrothermal main driver 2, auxiliary driver electrode 3, electrothermal auxiliary driver 4, fixed anchor 5, main cantilever beam 6, main locking contact 7, auxiliary locking contact 8, auxiliary Cantilever beam 9, flexible rod 10, contact head 11, signal line 12 and insulating dielectric layer 13, wherein: main driver electrode 1 is connected with electrothermal main driver 2, sub-driver electrode 3 is connected with electrothermal sub-driver 4, electrothermal main driver 2 and The ends of the electrothermal auxiliary driver 4 ...

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Abstract

The invention relates to an electrothermal-driven in-plane bistable radio frequency microswitch belonging to the technical field of micro electromechanics. The electrothermal-driven in-plane bistable radio frequency microswitch comprises an electrothermal-driven mechanism, a mechanical locking mechanism and a signal conversion mechanism, wherein the electrothermal-driven mechanism is positioned under the mechanical locking mechanism; and the mechanical locking mechanism is connected with the signal conversion mechanism. The invention can realize the mechanical locking by using a pair of locking contacts, does not require continuous power consumption when keeping in a stable state, also fully develops the advantages of large driving force, high displacement power density and convenient integrated manufacture of an electrothermal driver and can be used as the actuation form of the mechanical locking structure of the switch. The switch has simple structure, foreseeable radio frequency (RF) characteristic, possibility of batch manufacture and practical application and suitability for integral manufacture.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to an in-plane bistable radio frequency micro-switch driven by electrothermal. Background technique [0002] In recent years, radio frequency microelectromechanical system technology (RF MEMS) has shown great potential in both civilian and military applications, and one of the most important fields is RF MEMS switches. As far as the current common switches are concerned, semiconductor switches mainly composed of transistors and diodes have low power capacity and high resistance loss, and the speed of further increase in cut-off frequency is gradually slowing down; electromechanical switches have large power capacity, but large power consumption. Works rather slowly and only works on low frequencies. The RF MEMS switch not only combines the advantages of semiconductor switches and mechanical switches, but also overcomes their shortcomings; the re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P1/10B81B7/02
Inventor 汪红毛胜平吴义伯汤俊丁桂甫
Owner SHANGHAI JIAO TONG UNIV
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