Vision system for substrate alignment apparatus and method for controlling its focus
A technology for aligning equipment and vision systems, applied in camera focusing devices, projector focusing devices, focusing devices, etc., to solve problems such as loss of productivity and long processing time
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[0027] Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings. However, the present invention can be embodied in different forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art. In addition, the same or similar reference numerals represent the same or similar constituent elements, although they appear in different embodiments or drawings of the present invention.
[0028] figure 1 Illustrates a conceptual diagram of a substrate alignment apparatus according to an embodiment of the present invention. figure 2 Illustrates a conceptual diagram of a vision system for a substrate alignment apparatus according to an embodiment of the present invention.
[0029] See figure 1 with figure 2 , The substrate alignment app...
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