Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof

A micro-movement platform and three-translation technology, applied in machine/stand, measuring device, instrument, etc., can solve the problems of limited installation space and harsh environment.

Inactive Publication Date: 2011-09-14
CHINA UNIV OF MINING & TECH
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Problems solved by technology

[0005] The purpose of the present invention is to provide a large-stroke three-translation orthogonal decoupling precision micro-motion platform and its control method, to solve the problem that the precision micro-motio

Method used

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  • Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof
  • Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof
  • Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof

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Embodiment 1

[0014] Embodiment 1: The precision micro-motion platform system includes a precision micro-motion platform, a micro-displacement driver, a driver power supply, a central control unit, a laser displacement sensor and a displacement detection baffle, the laser displacement sensor is connected to the input end of the central control unit, and the laser displacement The sensor is located outside the precision micro-motion platform, and the displacement detection baffle is installed on the precision micro-motion platform. The laser displacement sensor corresponds to the displacement detection baffle; the output terminal of the central control unit is connected to the input terminal of the drive power supply, and the multi-channel drive power supply The output end is connected with each micro-displacement driver, and the micro-displacement driver is installed in the precise micro-motion platform.

[0015] The precision micro-motion platform includes a stage, an XY two-dimensional bas...

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Abstract

The invention relates to a large-stroke three-translation orthogonal decoupling-type precise micromotion platform and a control method thereof. A laser displacement transducer of a precise micromotion platform system is connected with the input end of a central control unit; the laser displacement transducer is positioned outside of the precise micromotion platform; a displacement detection baffle is mounted on the precise micromotion platform; the laser displacement transducer is corresponding with the displacement detection baffle; the output end of the central control unit is connected with the input end of a power supply of a driver; a multi-path output end of the power supply of the driver is connected with each micro displacement driver; and each micro displacement driver is mounted in the precise micromotion platform. A symmetrical structure is adopted for the precise micromotion platform, the decoupling at the motion direction and 'temperature drift effect' are effectively avoided, moreover the structure is simple and compact, the positioning accuracy is high, the working range of 1mm*1mm*50mu m can be realized, the precise micromotion platform and the control method thereof can be widely used in the fields requiring precise operation and manufacturing, such as bioengineering, optical fiber butt joint.

Description

technical field [0001] The invention relates to a three-translational micro-motion platform and a square control method thereof, in particular to a large-stroke three-translation orthogonal decoupling precision micro-motion platform and a control method thereof. Background technique [0002] Precision positioning technology is one of the key technologies of modern advanced manufacturing technology, and it is widely used in ultra-precision machining, micromanipulation, biomedical engineering and other fields that require fine manipulation. As one of the key equipment, the precision micro-motion platform plays an extremely important role in the precision positioning system. [0003] In 1962, Ellis, a foreign scholar, proposed to use a parallel mechanism as the mechanism form of the piezoelectric ceramic micro-manipulator, and carried out related experiments in microsurgery and biotechnology. Hara and Hemini studied planar three-degree-of-freedom and six-degree-of-freedom micr...

Claims

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Application Information

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IPC IPC(8): F16M11/04F16M11/18F16M11/20G01B11/02
Inventor 李威叶果杨雪锋王禹桥
Owner CHINA UNIV OF MINING & TECH
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