Method for treating tail gas of germane production system

A technology of production system and processing method, applied in the field of metal germanium powder, can solve problems such as high price, and achieve the effects of low cost, industrialization and simple process

Active Publication Date: 2013-04-03
中锗科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Germanium is a rare metal, expensive, and the recovery of germanium in the exhaust gas is very necessary

Method used

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  • Method for treating tail gas of germane production system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] The content of germane in the tail gas of the germane production system is 31ppm. The decomposition chamber is preheated and the temperature is controlled at 280°C. The tail gas is passed into the tail gas treatment device through the air inlet at a flow rate of 5L / min, and flows through the decomposition chamber, collection chamber and liquid-sealed bottle Then discharge from the air outlet. Detect the composition of the gas exhausted from the gas port, which contains germane 20ppb and dust 0.003mg / m 3 .

Embodiment 2

[0017] The temperature of the decomposition chamber in Example 1 is controlled at 360°C, and other processing conditions are the same, and the components of the gas discharged from the gas port are detected, which contains 12ppb of germane and 0.005mg / m of dust 3 .

Embodiment 3

[0019] The temperature of the decomposition chamber in Example 1 is controlled at 450°C, and other processing conditions are the same, and the components of the gas exhausted from the gas port are detected, which contains 9ppb of germane and 0.006mg / m of dust 3 .

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Abstract

The invention provides a method for treating tail gas aiming at the characteristics that the components of the tail gas of a germane production system are hydrogen and a trace amount of germane. The method comprises the following steps of: allowing the tail gas of the germane production system to flow through a tail gas treatment device consisting of an air inlet (1), an inflowing decomposition chamber (2), a collection chamber (3) and a liquid sealing bottle (4) and finally discharging by an air outlet (5) which is connected with a discharge system. When the tail gas flows through a preheated composition chamber, the germane is heated and decomposed into metal germane power, the superfine germane metal power formed through decomposition is brought into a collection chamber and is collected, a trace amount of germane powder of the treated tail gas is absorbed by the liquid sealing bottle filled with a liquid medium and then the treated gas is discharged so as to realize the standard emission of the tail gas and the recycling of germanium. The method is simple, low in cost, and high in germane removal efficiency, and by the method, industrial production is easy to realize.

Description

technical field [0001] The invention relates to a method for treating the tail gas of a germane production system, in particular to a method for heating the tail gas of the germane production system to thermally decompose a small amount of germane contained therein, and then collecting the metal germanium powder formed by the decomposition, so as to realize the discharge of the tail gas up to the standard and germanium recovery methods. Background technique [0002] High-purity germane is an important raw material gas for the semiconductor industry. It has been gradually applied to metal organic compound vapor phase epitaxy (MOVPE) to prepare germanium-containing semiconductor materials or devices, such as germanium-silicon thin-film solar cells. [0003] The manufacturing methods of germane include the following types: germanium alloy and acid or ammonia hydrolysis; alkaline solution electrolysis of germanium dioxide; reduction of germanium salt or germanium oxide. [0004...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): B01D53/74C01B6/06
CPCY02P20/129
Inventor赵立奎柯尊斌黄兴灯
Owner中锗科技有限公司