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Electronic component and manufacturing method thereof

A technology of electronic components and manufacturing methods, which is applied in the fields of printed circuit manufacturing, multilayer circuit manufacturing, electrical components, etc., and can solve problems such as wiring groove defects, conductor plate deformation, etc.

Inactive Publication Date: 2011-11-30
FUJITSU LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, if the imprint method is used to form fine and complicated wiring, when the conductor plate is peeled off from the resin layer, a part of the resin layer adheres to the conductor plate, resulting in a problem that the wiring groove is damaged.
Furthermore, the imprint method also has the problem that the unevenness of the wiring shape formed on the conductor plate is deformed when the conductor plate is used many times.

Method used

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  • Electronic component and manufacturing method thereof
  • Electronic component and manufacturing method thereof
  • Electronic component and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0075] Figure 1 to Figure 2 It is a sectional view during the manufacturing process of the electronic component of this embodiment.

[0076] In this embodiment, a circuit board is manufactured as follows and used as an electronic component.

[0077] First, if figure 1 As shown in (a), an adhesive layer 12 is formed on a transparent support substrate 11 such as a glass substrate. Preferably, as the above-mentioned adhesive layer 12 , a UV tape whose adhesive force is weakened by irradiation of ultraviolet rays, a thermally foamed adhesive film whose adhesive force is weakened by heating, or the like is preferably used.

[0078] Next, a thermosetting resin or a thermoplastic resin is applied on the adhesive layer 12, and the first resin layer 13 made of the material is formed with a thickness of, for example, about 10 to 20 μm. However, this thickness is set according to the height of the convex pattern of the conductor plate mentioned later.

[0079] Thermosetting resins t...

no. 2 approach

[0100] Figure 3 to Figure 4 It is a sectional view during the manufacturing process of the electronic component of this embodiment. In addition, in these figures, the same reference numerals as those in the first embodiment are assigned to the same elements described in the first embodiment, and descriptions thereof will be omitted below.

[0101] like figure 2 As shown in (b), in the first embodiment, the circuit board 10 having one layer of the first conductor pattern 14z was produced, but in the present embodiment, a circuit board 10 having two layers of conductor patterns laminated is produced as follows: circuit substrate.

[0102] To manufacture such a circuit board, first, perform the process described in the first embodiment figure 1 (a)~ figure 2 The process of (a).

[0103] Next, if image 3 As shown in (a), the thermosetting second resin layer 17 is formed on the first resin layer 13 and the first conductor pattern 14z, respectively. Then, the second resin...

no. 3 approach

[0125] Figure 5 to Figure 7 It is a sectional view during the manufacturing process of the electronic component of this embodiment.

[0126] In the first and second embodiments, a circuit board is produced as an electronic component using a conductor plate, but in this embodiment, a conductor pattern is formed on a circuit board already prepared as follows.

[0127] First, if Figure 5 As shown in (a), one circuit board 30 is prepared on the surface of a resin base material 31 with an electrode pad 32 formed of a copper film or the like having a thickness of, for example, about 5 to 10 μm.

[0128] In addition, instead of the resin base material 31 , a build-up substrate in which a plurality of insulating layers and wiring layers are alternately formed may be prepared.

[0129] Next, if Figure 5 As shown in (b), by applying a thermosetting resin on the circuit board 30, the resin layer 33 is formed, for example, with a thickness of 10 to 20 μm. The material of the resin ...

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Abstract

An electronic component and a method for manufacturing the electronic component, wherein a conductor pattern that is finer than conventional ones is formed. The method for manufacturing the electronic component comprises: a step where a resin layer (13) is formed on a transparent supporting base (11); a step where a conductor plate (14) provided with a pattern (14w) on one major surface (14x) is pressed against the resin layer (13) to embed the pattern (14w) in the resin layer (13); and a step where the other major surface (14y) of the conductor plate (14) is ground, polished by CMP, or cut until the resin layer (13) appears so as to leave the pattern (14w) as a conductor pattern (14z) in the resin layer (13).

Description

technical field [0001] The present invention relates to an electronic component and a manufacturing method thereof. Background technique [0002] Semiconductor devices such as LSIs are constantly pursuing miniaturization, and there are products with wiring widths of submicron order among shipped products. [0003] On the other hand, in circuit boards for mounting semiconductor devices, the wiring width is set at a minimum of about tens of μm, which is two digits larger than that of semiconductor devices. In order to increase the speed of electronic equipment and further reduce the size of portable equipment, it is necessary to mount semiconductor devices at high density on circuit boards, and for this purpose, reduction in the wiring width of circuit boards is also expected. [0004] As methods for forming wiring on a circuit board, the erasing method, the semi-additive method, and the imprint method are disclosed. [0005] Among them, the erasing method forms wiring by we...

Claims

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Application Information

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IPC IPC(8): H05K3/20H05K3/22H05K3/46
CPCH01L2924/01006H01L2924/1579H01L2924/01004H01L24/32H05K2203/025H01L24/81H05K3/4694H05K2201/09972H01L2924/01082H01L2924/1517H01L2224/81193H05K1/142H05K2201/0352H01L2924/01073H01L2224/73204H01L2924/01005H01L2924/01033H01L2224/29111H05K2203/1189H01L2924/01079H01L24/16H01L2224/81001H01L2224/32225H01L2924/014H01L2224/13099H01L2924/0105H01L2224/2919H01L24/83H01L2924/0132H01L2924/01029H01L2224/16225H05K3/4658H01L2224/81191H05K3/20H01L2924/01024H01L2924/0665H05K2201/0108H01L2224/838H01L2224/81192H01L2224/83193H01L2924/15788H01L2924/12042H01L2224/10175H01L2224/131H01L2224/16237Y10T428/24917Y10T156/1052Y10T29/49117H01L2924/00H01L2924/01047H01L2924/3512H01L2924/00014H01L2924/01083H05K3/22H05K3/46
Inventor 水越正孝石月义克
Owner FUJITSU LTD