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Microgyros for determining rotational motion about the x-axis and/or y-axis and z-axis

By dividing the oscillating mass block of the micro-gyro into two groups and using synchronization springs to achieve synchronous oscillation, the problem of difficulty in manufacturing and driving existing three-dimensional micro-gyros is solved, and detection accuracy and cost-effectiveness are improved.

Inactive Publication Date: 2015-08-05
HANKING ELECTRONICS HONGKONG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantage is that it has an inner plate, an outer ring and four driven masses
The requirement of less stiffness in two orthogonal directions of rotation The spring structure is susceptible to tolerances and difficult to achieve

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0051] figure 1 This is a feasible embodiment of the micro gyro 1 of the present invention. The central anchor 2 is fixed on a substrate lying in the drawing plane, on which eight oscillating driving masses 4 and 5 are arranged by means of a discus-shaped inner suspension 3 in the form of an inner frame, these driving masses are divided into two parts. groups, the representative masses of each group are arranged at 90° to each other. The masses 4 of the first group are fastened to the inner suspension 3 and the outer suspension 7 by means of (drive) springs 6 symbolically represented in the figures, which can preferably be provided, but can also be omitted. The two suspensions 3 and 7 can also have profiles other than annular, eg square profiles.

[0052] The springs 6 of the first set of masses 4 are elastic in the radial direction and have maximum rigidity in all other degrees of freedom. In the present embodiment, the four masses 5 of the second group are connected to th...

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PUM

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Abstract

The invention relates to a microgyroscope for determining rotational movements about an x-axis and / or a y-axis and a z-axis. Oscillating masses are fastened to a substrate by springs. Drive elements vibrate individual masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements detect deflections of the masses on account of the Coriolis forces produced. The Individual masses are arranged in two groups that are jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses of the first group allow movements starting from the x-y plane, and the masses of the second group allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.

Description

technical field [0001] The invention relates to a microgyroscope for determining rotational movements about the x-axis and / or the y-axis and the z-axis, the microgyroscope being embodied in particular as a three-dimensional sensor, comprising a substrate, a plurality of oscillating masses, a plurality of a spring securing the oscillating masses on the substrate, a plurality of drive elements and a plurality of sensing elements for causing at least individual ones of the masses to oscillate in the x-y plane A pendulum is used to generate a Coriolis force when the substrate rotates, and the sensing element is used to detect the deflection of the mass by the generated Coriolis force. Background technique [0002] Microelectromechanical (MEMS) gyroscopes are commonly used to measure rotational motion about an axis in an x-y-z coordinate system. Therefore, if the rotational motion of the system about each axis is to be measured, three such microgyroscopes are required. This app...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5691G01C19/56
CPCG01C19/5747
Owner HANKING ELECTRONICS HONGKONG CO LTD