On-line in situ detecting device for infrared-ultraviolet double pulse laser induced breakdown spectroscopy
A laser-induced breakdown, double-pulse technology, applied in measurement devices, material excitation analysis, material analysis by optical means, etc., can solve the problems of low plasma temperature and density, limited emission spectrum intensity, and low analytical sensitivity, etc. Achieve the effect of improving sensitivity, prolonging relaxation time, and simple and fast analysis
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[0023] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0024] 1. System overview
[0025] The IR-UV double-pulse laser-induced breakdown spectroscopy online in-situ detection device is based on double-pulse laser-induced breakdown spectroscopy (Double Pulse Laser Induced Breakdown Spectroscopy for short DP-LIBS) technology, which is mainly composed of a double-pulse laser emission system, a fixed-point sampling detection system, The optical radiation collection system and the data acquisition and processing system are composed of four major parts. The core components include infrared band lasers (take 1064nm Nd:YAG nanosecond pulse laser as an example), ultraviolet band lasers (take 193nm ArF excimer nanosecond pulse laser as an example), pulse delay controller, beam remote convergence adjustment device, spectrum Remote receiving device, seven-channel high-resolution miniature optical fiber, full-band la...
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