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Slit electrode and charged particle beam generating device having the slit electrode

A technology of slit electrodes and electrodes, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problem of not being able to fully suppress the thermal strain of electrodes, and achieve the effect of suppressing thermal strain and suppressing shape changes

Active Publication Date: 2014-10-01
NISSIN ION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the structures disclosed in Patent Document 1 and Patent Document 2 cannot sufficiently suppress the thermal strain of the electrode, and when the electrode frame or the electrode support frame is thermally deformed, the required ion beam or electron beam cannot be extracted.

Method used

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  • Slit electrode and charged particle beam generating device having the slit electrode
  • Slit electrode and charged particle beam generating device having the slit electrode
  • Slit electrode and charged particle beam generating device having the slit electrode

Examples

Experimental program
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Effect test

Embodiment Construction

[0058] figure 1 An example of an ion source 1 having a slit electrode of the present invention is described in . The ion source 1 is a type of ion source called a barrel ion source.

[0059] The ion source 1 includes a rectangular plasma generating container 4 from which a substantially ribbon-shaped ion beam 3 is drawn.

[0060] The gas source 2 is attached to the plasma generation container 4 via a valve not shown, and a gas serving as a raw material of the ion beam 3 is supplied from the gas source 2 . In addition, a gas flow regulator (mass flow controller) not shown is connected to the gas source 2 , and the gas supply rate from the gas source 2 to the inside of the plasma generation container 4 is adjusted by the gas flow regulator.

[0061] On one side of the plasma generation container 4, a plurality of U-shaped filaments 11 are attached along the Y direction. Using the power supply V connected between the terminals of the filament 11 F , the amount of current flo...

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PUM

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Abstract

The present invention provides a slit electrode and a charged particle beam generator having the slit electrode, wherein the shape of the slit-shaped opening is less likely to be thermally deformed during operation of the charged particle beam generator. The slit electrode (20) of the present invention comprises: an electrode frame (21) having an opening (22); The mobile devices are supported by the electrode frame (21), and are arranged in parallel on the opening (22) in a direction substantially perpendicular to the longitudinal direction. At least a part of the outer peripheral area of ​​the opening (22) of the electrode frame (21) is provided with a refrigerant flow path (R), and the refrigerant flow path (R) includes: a refrigerant inflow port (RIN) for making the refrigerant Flow into the electrode frame (21); and the refrigerant outflow port (ROUT), so that the refrigerant flows out from the electrode frame (21).

Description

technical field [0001] The present invention relates to a slit electrode applied to a charged particle beam generating device such as an ion source of an ion beam irradiating device and an electron source of an electron beam irradiating device, and a charged particle beam generating device having the slit electrode. Background technique [0002] Conventionally, a slit electrode having a plurality of slit-shaped openings has been used as an extraction electrode system for extracting an ion beam from an ion source of an ion beam irradiation device. Such a slit electrode can prevent deformation of the shape of the opening due to heat generated during operation of the ion source. Patent Document 1 (Japanese Patent Laid-Open Publication No. 7-34358 ( figure 2 , image 3 )) discloses specific examples of such slit electrodes. [0003] The electrode disclosed in Patent Document 1 includes: an electrode frame having an opening; and a plurality of electrode rods arranged in parall...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/04H01J37/08H01J37/32
CPCH01J37/063H01J37/3174H01J37/32568H01J37/3438H01J2237/24507H01J2237/3175
Inventor 井内裕谷井正博
Owner NISSIN ION EQUIP CO LTD
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