Microfabricated cylindrical fins for thermal management
A fin and column technology, applied in the field of bare fins with column fins, can solve problems such as increasing the package size
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[0018] see figure 2 The exemplary embodiment shown in , provides an electronic package 200 with improved thermal management. Package 200 includes system board 202 and substrate 204 . Substrate 204 (which may be formed of silicon or other substrate material) may be coupled to system board 202 by solder balls 208, bumps, or any other coupling means. Die 206 may be electrically coupled to substrate 204 through flip chip bumps 212, and an underfill layer 210 may be added therebetween to enhance the reliability of the package.
[0019] Die 206 may be made of silicon or any other material used to fabricate a die. Die 206 may include front-end-of-line (FEOL) and back-end-of-line (BEOL) sections (shown simplified as a single layer 214 ). The FEOL section may include top layers for active devices, and the BEOL section may include multiple metal layers.
[0020] A plurality of cylindrical fins 220 extend outward from the rear surface of die 206 to improve thermal management of pack...
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