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Grinding stone seat, dismantling fixture, grinding machine and dismantling method of grinding stone seat

A technology of stone seat and grinding stone, which is applied to the parts of grinding machine tools, grinding machines, machine tools suitable for grinding workpiece planes, etc., and can solve problems such as damage

Inactive Publication Date: 2016-09-14
KOMATSU NTC LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this method, the internal thread portion that engages with the external thread portion of the pressing bolt is formed on the inner peripheral surface of the insertion hole into which the shaft portion of the fixing bolt is inserted. The threaded part may be damaged due to interference with the shaft part of the fixing bolt
Therefore, this method is also not suitable for use on the grinding machine described in the above-mentioned Patent Document 1.

Method used

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  • Grinding stone seat, dismantling fixture, grinding machine and dismantling method of grinding stone seat
  • Grinding stone seat, dismantling fixture, grinding machine and dismantling method of grinding stone seat
  • Grinding stone seat, dismantling fixture, grinding machine and dismantling method of grinding stone seat

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[0086] Although the above-mentioned embodiments described the present invention, it should not be understood that the present invention is limited by the statements and drawings constituting a part of this disclosure. Various alternative embodiments, examples, and operation techniques can be clarified by those skilled in the art from this disclosure.

[0087] (A) In the above embodiment, in the support member 210 of the jig 200 , the insertion portion 212 has the outer diameter g2 larger than the outer diameter g1 of the support shaft portion 211 , but is not limited thereto. Such as Figure 11 As shown, the outer diameter g2 of the insertion portion 212 may be substantially equal to the outer diameter g1 of the support shaft portion 211 .

[0088] (B) In the above embodiment, the pedestal 381 of the grindstone base 38 has the two first through holes 50 and the four second through holes 60 , but it is not limited thereto. The pedestal 381 may also have one or more than three...

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Abstract

PURPOSE: A grindstone base, a removing jig, a grinding machine, and a removal method of the grindstone base are provided to simply remove the grindstone base from a mounting unit without damage to a mounting face of the mounting unit. CONSTITUTION: A grindstone base(38) comprises a seat(381) and a grindstone(382). The seat has first and second faces and two through holes. The through holes pass through the second face from the first face. Each through hole has a counter boring hole and an insertion hole. The counter boring hole is open on the first face and has a first inner diameter. The insertion hole is connected to the counter boring hole and has a second inner diameter smaller than the first inner diameter of the counter boring hole. The grindstone is formed on the first face of the seat in a ring shape.

Description

technical field [0001] The invention relates to a grinding stone seat, a dismantling fixture, a grinding machine and a dismantling method of the grinding stone seat. Background technique [0002] At present, as one of the methods of grinding a semiconductor wafer (hereinafter referred to as "workpiece"), it is widely known to continuously cut the grinding surface of the workpiece by rotating both the workpiece and the grindstone base with the grindstone. The lateral grinding method (for example, refer to Patent Document 1). It should be noted that the grindstone base is composed of a pedestal and a grindstone. The pedestal has a first surface facing the workpiece and a second surface provided on the opposite side of the first surface, and the grindstone is annularly formed on the first surface of the pedestal. [0003] Patent Document 1: (Japanese) Unexamined Patent Publication No. 2007-125678 [0004] In the grinding machine described in Patent Document 1, the grindstone...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B7/22B24B41/06
CPCB24B7/22B24B45/00B24D99/00H01L21/304
Inventor 武田英俊
Owner KOMATSU NTC LTD