Test method for reliability of oxide dielectric layer insulation breakdown over time
A technology of insulation breakdown and test method over time, which is applied in the direction of testing dielectric strength, semiconductor/solid-state device testing/measurement, etc., to achieve the effect of more accurate time evaluation and fast time evaluation
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no. 1 example
[0029] figure 1 A schematic diagram of a method for testing the reliability of an oxide dielectric layer over time for insulation breakdown according to the first embodiment of the present invention is schematically shown.
[0030] like figure 1 As shown, the method for testing the reliability of the oxide dielectric layer over time for insulation breakdown according to the first embodiment of the present invention includes:
[0031] During the first test period T11, the first acceleration voltage V1 is applied to the test structure, and the first leakage current monitoring value C1 of the oxide medium is tested at the same time;
[0032] During the first injection period T21 after the first test period T11, no stress acceleration voltage is applied to the test structure, but a stress acceleration current is injected into the oxide dielectric layer to be tested;
[0033] During the second test period T12 after the first injection period T21, the second stress acceleration vo...
no. 2 example
[0047] figure 2 A schematic diagram of a method for testing the reliability of an oxide dielectric layer over time for insulation breakdown according to the second embodiment of the present invention is schematically shown.
[0048] like figure 2 As shown, it shows that the acceleration voltages of the respective test periods (the first test period T11, the second test period T12, the third test period T13 and the fourth test period T14) are constant and equal.
[0049] That is, for the second embodiment, the following relationship exists:
[0050] First acceleration voltage V1=second acceleration voltage V2=third acceleration voltage V3=third acceleration voltage V4.
no. 3 example
[0052] image 3 A schematic diagram of a method for testing the reliability of an oxide dielectric layer over time for insulation breakdown according to the third embodiment of the present invention is schematically shown.
[0053] like image 3 As shown in FIG. 2 , it shows that the acceleration voltage of each test period (the first test period T11, the second test period T12, the third test period T13 and the fourth test period T14) gradually increases in the respective test periods.
[0054]
[0055] Although the above-mentioned embodiments all show that the whole test includes four test periods (the first test period T11, the second test period T12, the third test period T13 and the fourth test period T14) and three injection periods (the first injection period T21, the second injection period T22 and the third injection period T23), but for any person skilled in the art, it can be understood that the number of test periods and the number of injection periods included ...
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