Combination machining method for removing high-frequency errors in optical elements

A technology of optical parts and processing methods, applied in metal processing equipment, optical surface grinders, manufacturing tools, etc., can solve the problems of optical parts processing effect to be improved, difficult to effectively control medium and high frequency errors, residual processing characteristics, etc.
CN102848287BActive Publication Date: 2014-09-17NAT UNIV OF DEFENSE TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NAT UNIV OF DEFENSE TECH
Publication Date
2014-09-17

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Abstract

The invention discloses a combination machining method for removing high-frequency errors in optical elements. The combination machining method includes measuring surface shape errors of an optical element to be machined by an interferometer, carrying out PSD (power spectral density) analysis, and determining distribution characteristics of the medium and high-frequency errors on the basis of a DSD curve; acquiring an optimized removal function model according to predetermined machining time and machining precision, and acquiring an amplitude spectral line of a removal function; acquiring cut-off frequency of the removal function according to the amplitude spectral line; machining by a magneto-rheological finishing process if correctable medium and high-frequency errors with the frequency lower than the cut-off frequency exist according to the frequency distribution of the medium and high-frequency errors; and machining by a computer controlled optical surfacing process if uncorrectable medium and high-frequency errors with the frequency higher than the cut-off frequency exist according to the frequency distribution of the medium and high-frequency errors. By the combination machining method, technical advantages of MRF (magneto-rheological finishing) and technical advantages of CCOS (computer controlled optical surfacing) can be sufficiently combined, efficient uniform convergence of all-band errors of the optical element can be realized, and performance of the optical element is effectively improved.
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Description

technical field

[0001] The invention relates to a processing method for optical parts, in particular to a process method for controlling high-frequency errors in optical parts. Background technique

[0002] In the traditional optical processing methods, there is a large-area spatial geometric contact form between the processing tool and the optical element, which is conducive to the generation of the continuity of the surface shape error. The mechanochemical comprehensive effect between the polishing abrasive and the optical element material is mainly reflected in the evolution of micro-scale errors, that is, the high-frequency roughness error. Therefore, the workpiece surface errors obtained by traditional processing methods (such as classical polishing, ring polishing, etc.) basically do not contain serious mid-to-high frequency error forms, which can ensure the good optical performance of optical components.

[0003] The development of modern advanced optical manufacturi...

Claims

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