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Combination machining method for removing high-frequency errors in optical elements

A technology of optical parts and processing methods, applied in metal processing equipment, optical surface grinders, manufacturing tools, etc., can solve the problems of optical parts processing effect to be improved, difficult to effectively control medium and high frequency errors, residual processing characteristics, etc.

Active Publication Date: 2013-01-02
NAT UNIV OF DEFENSE TECH
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Problems solved by technology

[0006] However, in the prior art, a single removal mechanism is generally used to control the medium and high frequency errors of optical parts, but it is difficult to achieve effective control of medium and high frequency errors with a single removal mechanism, and processing features directly related to the removal mechanism often remain. The processing effect of the removal mechanism on high-frequency errors in optical parts also needs to be improved

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  • Combination machining method for removing high-frequency errors in optical elements
  • Combination machining method for removing high-frequency errors in optical elements
  • Combination machining method for removing high-frequency errors in optical elements

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Embodiment 1

[0086] A combined processing method for high-frequency errors in optical parts of the present invention. The processing object of the processing method in this embodiment is a parabolic mirror with a diameter of 200 mm and a vertex radius of curvature of 640 mm. The processing method of this embodiment includes the following steps:

[0087] 1. Evaluation of the machinability of medium and high frequency errors: the operation steps of the evaluation of the machinability of medium and high frequency errors in this embodiment are as follows Figure 4 shown.

[0088] 1.1PSD analysis: firstly carry out PSD analysis on the surface error of the above-mentioned parabolic mirror of the optical part to be processed, and obtain the PSD curve of the surface error (see Figure 6 ), referring to the US QED company’s division standards for optical parts in the low, medium, and high frequency bands, that is, the error space periods are >D / 5, D / 5~D / 30, and -1 ;

[0089] 1.2 Optimization of re...

Embodiment 2

[0100] A combined processing method for high-frequency errors in optical parts of the present invention, the processing object of the processing method in this embodiment is a plane mirror with a diameter of 100mm, and the processing method in this embodiment includes the following steps:

[0101] 1. Evaluation of the machinability of medium and high frequency errors: the operation steps of the evaluation of the machinability of medium and high frequency errors in this embodiment are as follows Figure 4 shown.

[0102] 1.1 PSD analysis: first, PSD analysis is performed on the surface error of the above-mentioned plane mirror of the optical part to be processed, and the distribution of the surface error is obtained as follows: Figure 9 As shown, the obtained PSD curve is as follows Figure 13 As shown, it can be seen that there is a spatial frequency of 0.2mm in the surface shape error -1 The sinusoidal surface error structure; according to the division standard of medium a...

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Abstract

The invention discloses a combination machining method for removing high-frequency errors in optical elements. The combination machining method includes measuring surface shape errors of an optical element to be machined by an interferometer, carrying out PSD (power spectral density) analysis, and determining distribution characteristics of the medium and high-frequency errors on the basis of a DSD curve; acquiring an optimized removal function model according to predetermined machining time and machining precision, and acquiring an amplitude spectral line of a removal function; acquiring cut-off frequency of the removal function according to the amplitude spectral line; machining by a magneto-rheological finishing process if correctable medium and high-frequency errors with the frequency lower than the cut-off frequency exist according to the frequency distribution of the medium and high-frequency errors; and machining by a computer controlled optical surfacing process if uncorrectable medium and high-frequency errors with the frequency higher than the cut-off frequency exist according to the frequency distribution of the medium and high-frequency errors. By the combination machining method, technical advantages of MRF (magneto-rheological finishing) and technical advantages of CCOS (computer controlled optical surfacing) can be sufficiently combined, efficient uniform convergence of all-band errors of the optical element can be realized, and performance of the optical element is effectively improved.

Description

technical field [0001] The invention relates to a processing method for optical parts, in particular to a process method for controlling high-frequency errors in optical parts. Background technique [0002] In the traditional optical processing methods, there is a large-area spatial geometric contact form between the processing tool and the optical element, which is conducive to the generation of the continuity of the surface shape error. The mechanochemical comprehensive effect between the polishing abrasive and the optical element material is mainly reflected in the evolution of micro-scale errors, that is, the high-frequency roughness error. Therefore, the workpiece surface errors obtained by traditional processing methods (such as classical polishing, ring polishing, etc.) basically do not contain serious mid-to-high frequency error forms, which can ensure the good optical performance of optical components. [0003] The development of modern advanced optical manufacturi...

Claims

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Application Information

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IPC IPC(8): B24B13/00
Inventor 石峰胡皓宋辞彭小强戴一帆王贵林
Owner NAT UNIV OF DEFENSE TECH
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