Method for improving laser cutting quality of pendulous reed of accelerometer

Abstract

The invention provides a method for improving laser cutting quality of a pendulous reed of an accelerometer. The method is the method comprising the steps of manufacturing a cutting assisting device, installing, fixing, vibrating, cutting by laser and the like, so that the adhering slag is reduced, the taper of a cut is improved, and thus the laser cutting quality of the pendulous seed is improved. According to the method, the assisting device is provided and used for precisely positioning on real time, a sacrificial plate is added during cutting the pendulous reed through the laser, thus the residues without being taken away by the assisting gas can be attached on the sacrificial plate, and the defect due to the adhering slag close to the kerf of the pendulous reed can be removed, and the taper of the cut due to the scattering of the laser on the surface of a glass can be improved; the vibration is carried out during cutting through the laser, so that a laser focus can upwards and downwards move within the thickness range of the pendulous reed, and as a result, the problem that uniform energy in the thickness direction of the pendulous reed due to the concentrating of the laser energy in the focus cannot be realized can be greatly reduced, the purposes of reducing the taper of the kerf, improving the processing precision of the pendulous reed structure as well as improving the graphs and sizes of two surfaces can be realized, and the yield of processing is increased by more than 10%.

Description

technical field

[0001] The invention relates to a method for improving the laser cutting quality of an accelerometer pendulum, in particular to a method for improving the laser cutting quality of an accelerometer pendulum, and belongs to the technical field of laser cutting. Background technique

[0002] The pendulum plate is an important part of the accelerometer, its shape is complex, and it requires high dimensional accuracy and surface quality, and its processing quality has a direct impact on the performance of the accelerometer. The pendulum plate is usually made of quartz glass. In addition to the glass industry’s process methods such as grinding, polishing, cutting, and cleaning, the traditional mechanical processing methods are less applicable. Therefore, local thermal processing such as laser is often used in the production of the pendulum plate. Advanced technology to realize the precise structural form of the pendulum.

[0003] The energy concentration of the la...

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