The invention provides a method for improving
laser cutting quality of a pendulous reed of an
accelerometer. The method is the method comprising the steps of manufacturing a
cutting assisting device, installing, fixing, vibrating,
cutting by
laser and the like, so that the adhering
slag is reduced, the taper of a
cut is improved, and thus the
laser cutting quality of the pendulous seed is improved. According to the method, the assisting device is provided and used for precisely positioning on real time, a sacrificial plate is added during cutting the pendulous reed through the laser, thus the residues without being taken away by the assisting gas can be attached on the sacrificial plate, and the defect due to the adhering
slag close to the kerf of the pendulous reed can be removed, and the taper of the
cut due to the scattering of the laser on the surface of a glass can be improved; the vibration is carried out during cutting through the laser, so that a laser focus can upwards and downwards move within the thickness range of the pendulous reed, and as a result, the problem that uniform energy in the thickness direction of the pendulous reed due to the concentrating of the laser energy in the focus cannot be realized can be greatly reduced, the purposes of reducing the taper of the kerf, improving the
processing precision of the pendulous reed structure as well as improving the graphs and sizes of two surfaces can be realized, and the yield of
processing is increased by more than 10%.