Method and device for cutting transparent material by using ultra-short pulse laser
A technology of ultra-short pulse laser and transparent materials, which is applied in the direction of glass cutting devices, fine working devices, laser welding equipment, etc., can solve the problems of rough cutting surface and slow cutting speed, and achieve good cutting surface quality, deep cutting depth, small kerf effect
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[0052] Example one
[0053] Please refer to Figure 5 This embodiment uses a picosecond laser ultra-short pulse laser generator with a high repetition rate-picosecond laser 8. In this embodiment, two different picosecond lasers can be used, one is that the repetition frequency Fcon is 15 MHz , A picosecond laser with a maximum average output power of 100W and a single pulse width of 12ps, using an external electro-optical switch to modulate the pulse, the modulation frequency Frep is 1 Hz to 1 MHz. The modulation pulse width Wt can be controlled between 20 nanoseconds and 2 microseconds, so that each trigger signal can output 1-12 laser pulses. The other is the seed source output frequency Fseed and 50 MHz, with two high-frequency electro-optical switches inside and outside the laser cavity for modulation, and the average output power Po is 50W, the repetition frequency Frep 400 kHz to 1 MHz, pulse For a laser with a width of 8ps, each trigger signal pulse can output 1-10 picose...
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[0058] Example two
[0059] The basic structure is similar to the first embodiment. The difference is that in the laser transmission optical path, the laser is divided into two beams A and B through the beam splitter 14. The A beam occupies between 15-40% of the laser output power, and the A and B beams are used separately The diopter adjustable beam expander 15 expands the beam, and then adds a 1 / 2 wave plate 16 to the A beam path to deflect the laser polarization direction by 90 degrees, and then combines the A and B beams into one beam through the polarization splitter 18, and then adopts 1 / The 4-wave plate 19 converts the linear polarization of the laser light into circular polarization.
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