A mask assembly

A mask and component technology, applied in the field of OLED production, can solve the problem that the mask is easy to be thermally expanded

Inactive Publication Date: 2013-07-17
KUN SHAN POWER STENCIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The purpose of the present invention is to at least solve one of the above-mentioned technical defects, especially to solve the problem that the mask plate is easily thermally expanded in the evaporation chamber

Method used

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Embodiment Construction

[0027] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0028] see figure 1 , in one embodiment of the present invention, the mask assembly includes a mask body 1111 and a mask frame 2222, the mask body 1111 is fixed on the mask frame 2222 in a stretched state, the mask body 1111 and the mask frame 2222 is connected by welding or bonding, preferably by welding. The outer boundary 4444 of the frame 3333 of the mask frame 2222 coincides with the outline of the mask body 1111 , and the mask body 1111 is provided with a graphic opening 5555 . The mask body 1111 and the mask frame 2222 are welde...

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Abstract

The invention provides a mask assembly. The mask assembly includes a mask body and a mask frame; under tension state, the mask body is fixed on the mask frame; and both the mask body and the mask frame are made of Invar alloy 4J36. The Invar alloy 4J36 is adopted to make both the mask body and the mask frame of the mask assembly, because the invar alloy 4J36 has anomalous thermal expansion of an invar effect, and an average expansion coefficient thereof is generally 1.5*10<-6> DEG C, reaches 1.8*10<-8> DEG C when the nickel content of the material is 36%, and is invariable at the temperature range of -80 DEG C to +100 DEG C. Thus, the deformation of the mask body and the mask frame made from the material is small in a vapor deposition chamber, effectively reducing the dimensional accuracy deviation of a pattern opening and the positional accuracy deviation of the pattern opening, effectively improving vapor deposition quality, and increasing the film-forming rate of an organic vapor deposition material.

Description

[0001] technical field [0002] The invention relates to the field of OLED production, in particular to a mask plate assembly for evaporation used in the OLED production process that can effectively improve the quality of evaporation. [0003] Background technique [0004] According to the material of the light emitting layer, electroluminescent display devices can be classified into inorganic electroluminescent display devices and organic electroluminescent display devices. Since organic electroluminescent display devices can have higher brightness and faster response time compared with inorganic electroluminescent display devices, and can also display color images, in recent years, organic electroluminescent display devices have become popular in the field of organic electroluminescent display devices. corresponding development has been achieved. [0005] Generally, an organic light emitting display device includes an organic light emitting layer between an anode and a c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C22C38/08
Inventor 魏志凌高小平郑庆靓孙倩
Owner KUN SHAN POWER STENCIL
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