Data processing method of excimer laser interference fringes

A technology of excimer lasers and interference fringes, which is applied in the direction of electrical digital data processing, special data processing applications, lasers, etc., can solve problems such as noise pollution, mode aliasing, and aliasing between fringes, etc., to reduce noise and improve The effect of precision and accuracy

Active Publication Date: 2016-09-21
安徽中科春谷激光产业技术研究院有限公司
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Problems solved by technology

In engineering practice, due to the noise pollution in the test process, the fringes are prone to aliasing, which is not conducive to the subsequent measurement of other laser parameters
[0003] In the existing technology, the classical mode decomposition (Empirical Mode Decomposition, EMD) method is adopted. EMD has good phase preservation, but it has the disadvantage of mode aliasing
Mode aliasing means that an IMF signal contains extremely different characteristic time scales, or similar characteristic time scales are distributed in different IMFs, resulting in the aliasing of two adjacent IMF waveforms, affecting each other, and making it difficult to distinguish
For excimer lasers, there are often different forms of pulse interference and noise due to factors such as discharge and vibration, so mode aliasing limits the application of EMD in excimer laser systems

Method used

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  • Data processing method of excimer laser interference fringes
  • Data processing method of excimer laser interference fringes
  • Data processing method of excimer laser interference fringes

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Embodiment Construction

[0030] specific implementation plan

[0031] The embodiments will be described in detail below in conjunction with the accompanying drawings. It should be emphasized that the following description is illustrative only, and not intended to show the scope of the invention and its application.

[0032] Embodiments of the present invention are provided below in conjunction with the accompanying drawings:

[0033] see first figure 2 , figure 2 It is a block diagram of the system hardware of the present invention. The system hardware of the present invention starts from the excimer laser and sequentially includes a focusing lens 1, a first fused silica optical fiber 2, an optical fiber coupler 3, a second fused silica optical fiber 4, a wavelength precision measuring device 5, and a photodiode array 6, data line 7 and computer 8, the wavelength precision measurement device 5 is composed of lens 9, microlens array 10, etalon 11 and imaging lens 12 in turn, the signal light is im...

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Abstract

The invention provides a method for processing data of excimer laser interference fringes. The method for processing the data of the excimer laser interference fringes comprises the following steps that the interference fringes formed by an excimer laser through an etalon, a lens and the like are imaged on a photodiode array, and the interference fringes are sent to a computer through a data acquisition module for data processing by the adoption of an overall average classical modal decomposition method. According to the method for processing the data of the excimer laser interference fringes, noise auxiliary signals are introduced for processing, noises are mutually counteracted after repeated averaging, and then original signals are reconstructed, therefore, measuring precision and the accuracy degree are improved, and precise computing in a later stage is benefited.

Description

technical field [0001] The invention relates to the field of data processing of interference fringes, and provides an excimer laser-based interference fringe data processing method. Background technique [0002] The application of narrow linewidth lasers represented by excimer lasers in industrial scientific research is of great significance. In engineering practice, due to the noise pollution in the test process, the aliasing between fringes is easy to occur, which is not conducive to the subsequent measurement of other laser parameters. [0003] In the prior art, a classical mode decomposition (Empirical Mode Decomposition, EMD) method is adopted. EMD has good phase preservation, but has the disadvantage of mode aliasing. Mode aliasing means that an IMF signal contains extremely different characteristic time scales, or similar characteristic time scales are distributed in different IMFs, resulting in the aliasing of two adjacent IMF waveforms, affecting each other, and ma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F19/00H01S3/00
Inventor 姜丽媛张海波袁志军周军耿立明魏运荣
Owner 安徽中科春谷激光产业技术研究院有限公司
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