An eccentric self-rotating air pressure force large-diameter conformal polishing device

Abstract

The invention discloses an eccentric auto-rotating large-caliber shape-preserving polishing device by means of atmospheric pressure application in the field of super-precision optic surface finishing. The eccentric auto-rotating large-caliber shape-preserving polishing device comprises a motor, a rotary joint, a sleeve, a spindle, a piston, a ball head, a polishing plate, a retainer ring, non-Newtonian fluid and a shape-preserving film. The polishing plate is of an eccentric auto-rotating structure and can generate Gaussian-like removal function with central peak. Air enters the air cylinder at the tail end of the spindle to push the piston to apply certain pressure on the polishing plate after passing the rotary joint and the hollow spindle, the non-Newtonian fluid can guarantee close fit of polyurethane and aspheric surface according to real-time deformation of the surface shape of a current contact area in the process of aspheric surface finishing, and stable removal function can be generated. The eccentric auto-rotating large-caliber shape-preserving polishing device is applicable to super-precision surface finishing of large-caliber aspheric-surface optic components.

Description

technical field [0001] The invention relates to an aspheric surface polishing device, in particular to an eccentric self-rotating air pressure force-applied large-diameter shape-conforming polishing device, which belongs to the field of ultra-precision optical aspheric surface processing. technical background [0002] In recent years, optical aspheric surfaces have been widely used in the new generation of optical systems, such as aerospace cameras, lithography machines, laser ignition, etc.; the application of aspheric surfaces provides optical designers with greater design freedom and optimizes the The system structure can better correct aberrations and improve imaging quality; at the same time, it effectively reduces the payload of the optical system and saves costs, especially in space-based optical systems. However, due to the non-uniform curvature of the aspheric surface, its ultra-precision machining and testing technology has always restricted the further development...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the existing problems of complex structure, insufficient torque, small processing caliber, and poor coincidence between the traditional asphalt polishing mold and the aspheric surface, the present invention proposes an eccentric self-rotating air pressure force-applied large-diameter Shaped polishing device, by adopting eccentric rotation structure, obtains a Gaussian-like removal function; and uses non-Newtonian fluid as an auxiliary medium, so that the polyurethane polishing mold can be deformed in real time according to the surface shape of the aspheric surface, combined with the gas pressure method, obtained Stable removal function in aspheric surface processing; it is a precision optical surface processing device with exquisite structure, high degree of integration and good stability

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