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Exposure device

A technology of exposure device and exposure section, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, optics, etc., can solve the problem of overall complexity of the device, and achieve the effect of flexible production line, no need for modification cost, and flexible response

Active Publication Date: 2017-10-24
ADTEC ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the above-mentioned conventional structure, although the pre-alignment device can be eliminated, a conveyance device such as a conveyance conveyor for conveying the printed wiring board from the exposure device to the inversion device or from the inversion device to the exposure device is required, so there is a problem in the entire device. still complex issues

Method used

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Examples

Experimental program
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Embodiment Construction

[0017] Embodiments of the present invention will be described below based on the drawings.

[0018] figure 1 is a plan view of an exposure apparatus for manufacturing a printed wiring board according to the present invention, figure 2 is the main view.

[0019] This exposure apparatus has a one-surface side exposure part 1 for exposing one surface side, a transfer part 2, and another surface side exposure part 3 for exposing the other surface side, and these are arranged linearly at substantially equal intervals in this order. Exposure unit 1 includes loading / unloading unit 10 , exposure unit 3 includes loading / unloading unit 30 , and loading / unloading unit 10 and loading / unloading unit 30 load printed wiring board 99 from the previous process or unload printed wiring board 99 to the next process.

[0020] That is, the printed wiring board 99 that has been subjected to photoresist processing in the previous step is exposed on the front and back sides of one side and the oth...

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PUM

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Abstract

PROBLEM TO BE SOLVED: To provide an exposure apparatus for which a pre-alignment is not required after inversion of a printed wiring board.SOLUTION: The exposure apparatus comprises: one surface side exposing part 1 for performing exposure to one surface side of a printed wiring board 99; a transfer part 2; and other side exposing part 3 for performing exposure to the other surface side. The exposing parts 1, 3 respectively include suction hands 5, 6. The suction hand 5 performs inversion of the printed wiring board in the transfer part 2 placed between the exposing part 1 and the exposing part 3 to transfer the printed wiring board to the suction hand 6 directly.

Description

technical field [0001] The present invention relates to an exposure device for a printed wiring board. Background technique [0002] In an exposure apparatus for manufacturing a printed wiring board having circuits formed on both surfaces of a substrate, two exposure apparatuses are arranged, and a substrate inversion device is provided between the exposure apparatuses to expose both surfaces of the substrate. In addition, when the printed circuit board is conveyed from the exposure device to the inverting device by the conveyor, and when the inverting device is used for inverting, the printed circuit board deviates from the reference position. A pre-calibration device is set. [0003] Therefore, in such an exposure apparatus, problems such as complexity of the apparatus, lengthening of the production line, increase in cost, increase in manufacturing time, and decrease in productivity are caused. [0004] Therefore, various attempts have been made. For example, Patent Docu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/2002G03F7/201G03F7/2055G03F7/70775G03F7/70825G03F9/7003
Inventor 渡边健二
Owner ADTEC ENG