Distributed Bragg feedback tunable laser and manufacturing method thereof

Abstract

The invention discloses a distributed Bragg feedback tunable laser and a manufacturing method thereof. The method comprises the following steps: a lower waveguide layer, a multiple quantum well active area and an upper waveguide layer sequentially grow on a substrate; materials of a distributed Bragg feedback area and a phase area are obtained, wherein the band gap wavelengths of the materials of the distributed Bragg feedback area and the phase area are less than the light emitting wavelength of the laser; a grating is manufactured in the feedback area; the cladding and electrical contact layer materials grow on the whole surface of a tube core; an inverted frustum-shaped shallow ridge waveguide structure is manufactured on the cladding and the electrical contact layer of the feedback area, the phase area and a gain area, wherein the waveguide side wall of the structure is a (111) A crystal plane; electrical isolation grooves are etched in the electrical contact layer and ion implantation is carried out on the isolation grooves at the same time to realize electrical isolation between the gain area and the phase area and between the phase area and the feedback area. Through the adoption of the distributed Bragg feedback tunable laser and the manufacturing method thereof, the purpose that the feedback area has low series resistance when the concentration of implanted charge carriers is improved is achieved, and the device wavelength tuning range can be increased and the wavelength tuning sensitivity is improved.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a method for manufacturing a distributed Bragg feedback tunable laser. Background technique [0002] Tunable lasers are essential key devices in optical communication systems. To replace the fixed-wavelength DFB laser with a tunable laser, you only need to purchase the same tunable laser as a system light source backup, and adjust it to the corresponding wavelength when using it, so you only need to prepare a small number of tunable lasers to adjust to the corresponding wavelength. Just go up. This greatly reduces the types of lasers required and the quantity of purchases, simplifies management, and greatly saves costs. In addition, tunable lasers can also be used in multiple aspects such as rebuildable optical branching multiplexers, wavelength conversion and optical routing, and packet switching. [0003] Extending the wavelength tuning range and improving its wavelengt...

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Problems solved by technology

[0005] In view of this, the main purpose of the present invention is to provide a distributed Bragg feedback tunable laser to solve the problem that the wavelength tuning efficiency is not high due to the increase of the emission wavelength with the increase of temperature

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