A Laser Calibration Instrument Based on Boundary Differential and Ambient Light Self-calibration

A laser caliper and self-calibration technology, applied in the optical field, can solve the problems of boundary detection error amplification, non-uniform rotation speed of scanning mirror, stepper motor jitter, etc. Effect

Active Publication Date: 2017-10-10
CHINA JILIANG UNIV
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Problems solved by technology

[0003] (1) The scanning beam is an astigmatic elliptical Gaussian beam, so when performing photoelectric conversion, non-collimation errors are bound to be introduced, and boundary detection errors will be enlarged
[0004] (2) There is vibration in the stepping motor, which causes the local speed of the scanning mirror to be non-uniform, which affects the time of photoelectric detection
[0005] (3) The wavelength of the semiconductor laser is generally 500--700nm, the scanning spot radius is large, the resolution is low, and the surface of the workpiece to be tested is more prone to diffraction

Method used

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  • A Laser Calibration Instrument Based on Boundary Differential and Ambient Light Self-calibration
  • A Laser Calibration Instrument Based on Boundary Differential and Ambient Light Self-calibration
  • A Laser Calibration Instrument Based on Boundary Differential and Ambient Light Self-calibration

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with accompanying drawing.

[0027] Such as figure 1 As shown, a laser scanning caliper for online measurement of the diameter or thickness of a workpiece includes a laser 1, a mirror 2, a scanning mirror 3, a collimating lens 4, a light limiting hole 5, a calibration workpiece 6, and a workpiece 7 to be measured , an optical lens 8, a photoelectric detection component 9, and a data processing unit 10. The solid line in the figure is the specific optical path, the dotted line is the main optical axis, the dotted line is the alignment line, and the arrow is the process.

[0028] The laser emits the visible laser horizontally to the left, and the laser is reflected to the mirror surface of the scanning rotating mirror through the reflector, and the scanning rotating mirror rotates at a constant speed through the stepping motor. The speed of light is parallel light, where the luminous flux of the laser ...

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Abstract

The invention relates to a laser diameter measuring instrument based on boundary differential and environmental light self-calibration. The laser diameter measuring instrument uses the boundary differential algorithm to collect boundary signals and uses the environmental light self-calibration to solve the problems of astigmatism and surface diffraction of elliptical Gaussian light beams. Light limiting holes are used to constraint shaking errors of the rotary scanning lens. The laser diameter measuring instrument can be built under common optical lab conditions, high-precision diameter measuring and thickness measuring can be achieved, and the laser diameter measuring instrument is capable of self-calibration, low in system cost, high in measuring precision, and the like.

Description

technical field [0001] The invention relates to an instrument for measuring the diameter or thickness of a firmware, in particular to an instrument for measuring the diameter of a firmware with high precision, and belongs to the field of optical technology. Background technique [0002] With the rapid development of mechanical and electronic industries, the precision requirements for workpiece parameters are getting higher and higher. The biggest defect of traditional physical methods is that the size of the workpiece must be measured only by touching the workpiece. Laser scanning caliper is a detection system based on optical technology, modern laser, computer, precision machinery and other multidisciplinary technologies. It uses visible laser as the light source, and the geometric size of the measured object is scanned by the optical system and photoelectric The conversion system converts it into an electrical signal, and then the computer performs real-time data processin...

Claims

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Application Information

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IPC IPC(8): G01B11/08G01B11/06
Inventor 陈亮吴军法苏玲爱何莎捷严敏玲刘晨徐强毛世挺金尚忠张淑琴
Owner CHINA JILIANG UNIV
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