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Low-impact combined process nozzle for realizing uniform spraying

A combined process and low-impact technology, which is applied to the device and coating of the surface coating liquid, can solve the problems of uneven spraying of the nozzle and large impact on the spraying surface, and achieve simple structure, uniform spraying, and strong structural manufacturability Effect

Inactive Publication Date: 2014-04-02
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a combined process nozzle for uniform spraying and low impact, so as to solve the technical problems of uneven spraying and excessive impact of spraying liquid on the sprayed surface in the existing chip development process

Method used

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  • Low-impact combined process nozzle for realizing uniform spraying
  • Low-impact combined process nozzle for realizing uniform spraying
  • Low-impact combined process nozzle for realizing uniform spraying

Examples

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0023] refer to Figure 1-8 , the combined process nozzle for achieving uniform spraying and low impact includes a nozzle body 1, a first plate body 2 and a second plate body 3, all of which are in the shape of a strip.

[0024] The first plate body 2 is arranged sideways, and the nozzle main body 1 is arranged on the left side of the first plate body 2 and is sealed and combined with the first surface 2b of the first plate body 2, that is, the nozzle main body 1 and the first plate body 2 are arranged opposite to each other. The latter form a cavity 4 . The nozzle main body 1 is provided with a liquid supply channel 1 a communicating with the cavity 4 , and the first plate body 2 is provided with a plurality of liquid spray holes 2 a communicating with the cavity 4 .

[0025] The second plate body 3 is arranged on the second surface 2b of the first p...

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Abstract

The invention discloses a low-impact combined process nozzle for realizing uniform spraying. The low-impact combined process nozzle comprises a first plate body and a nozzle main body which are oppositely arranged to define a cavity, wherein the nozzle main body is provided with a liquid supply channel for being communicated with the cavity, the first plate body is provided with a plurality of liquid spraying holes communicated with the cavity, the first plate body is arranged sideways, the nozzle main body is arranged on the first surface of the first plate body, the second surface of the first plate body is provided with a second plate body, a part, close to the lower end, of the second surface is sunken towards the first surface to form a third surface parallel to the first surface, the lower half section of the second plate body is opposite to the third surface, and a certain distance is formed between the lower half section of the second plate body and the third surface so as to define a spraying slit, the lower end of the second plate body extends out of the bottom surface of the nozzle main body, and the plurality of liquid spraying holes penetrate through the first surface and the third surface. The combined process nozzle not only can reduce the impact pressure of spraying liquid on the spraying surface, but also can realize the uniform spraying.

Description

technical field [0001] The invention relates to a nozzle for spraying, especially a combined process nozzle, which is mainly used in the field of chip development process (but not limited to the development process). Background technique [0002] With the improvement of photolithography technology and the continuous reduction of chip feature size, the requirements for developing equipment and developing nozzles in the developing process are getting higher and higher, not only requiring uniform spraying, but also requiring less impact or pressure of the liquid on the sprayed surface during spraying. Small. Some existing developing nozzles have problems such as uneven spraying, excessive impact of the spraying liquid on the sprayed surface, and damage to the quality of the sprayed surface. Therefore, the requirement for designing nozzles with new structures is becoming more and more urgent. Contents of the invention [0003] The purpose of the present invention is to provi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C5/02
Inventor 刘学平徐强王汉向东牟鹏段广洪
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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