Large-aperture element surface detection device and corresponding damage quick localization method

Abstract

The invention discloses a large-aperture optical element surface damage detection device. The device comprises a line-scan digital camera component for acquiring a local low-precision linear array image on the surface of an optical element; a microscopic camera component for acquiring a local high-precision area array image on an optical surface; a scanning and focusing component for controlling the line-scan digital camera component and the microscopic camera component to scan, locate and focus the optical element surface; a special clamp for locating, clamping and regulating gesture of the optical element; and a data acquisition process for implementing image acquisition processing analysis and motor driving control. Furthermore, the invention discloses an element damage quick localization method. The method assigns an interested damage point in a linear array image and rapidly moves axis of the microscopic camera component to the damage point. The method disclosed by the invention can quickly localize damage on the optical element surface and realize high-precision microscopic imaging with localization precision being about 50mm. The device and the method have wide application prospect and considerable social and economic benefits.

Description

technical field [0001] The invention belongs to the field of large-diameter optical element surface damage detection, and in particular relates to a large-diameter optical element surface damage detection device and a corresponding rapid element damage positioning method. Background technique [0002] In the field of large-scale or ultra-large optical equipment manufacturing, large-aperture optical components are widely used. With the development of science and technology, people have higher and higher requirements for the surface quality of large-aperture optical components. Generally, large-aperture optical components need to be inspected for surface damage before they are used. At present, the detection and analysis of optical components mainly rely on human eyes or other auxiliary tools in China. Although many domestic university research institutes have also carried out a lot of related research work and developed some detection equipment, there are still many limitatio...

AI Technical Summary

Problems solved by technology

At present, the detection and analysis of optical components mainly rely on human eyes or other auxiliary tools in China. Although many domestic university research institutes have also carried out a lot of related research work and developed some detection equipment, there are still many limitations. And shortcomings, such as poor detection accuracy, low detection efficiency, single detection object, inconvenient operation, etc., so that it cannot be popularized and used

Images