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Metal grating polarization beam splitter and manufacturing method thereof

A technology of polarization beam splitter and metal grating, which is applied in the direction of instruments, light guides, optics, etc., to achieve good beam splitting characteristics, wide-angle wide-spectrum polarization beam splitting performance, stable and reliable performance

Active Publication Date: 2014-05-07
厦门市为纳光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is not reported that TM is diffracted while TE is reflected

Method used

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  • Metal grating polarization beam splitter and manufacturing method thereof
  • Metal grating polarization beam splitter and manufacturing method thereof
  • Metal grating polarization beam splitter and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Embodiment 1: A three-channel visible light band plasma polarization beam splitting device with TM diffraction / TE reflection / TM transmission of a double-layer metal grating.

[0050] Combining simulation results with commercial software RSOFT image 3 , Reflection, diffraction and transmission spectra of a double-layer metallic aluminum grating with a grating period of 280 nm. Both the width of the first dielectric grating 2.a and the second dielectric grating 2.b are half of the period, the first dielectric grating 2.a is PMMA, the refractive index is 1.5, the first dielectric grating 2.b is air, and the thickness is 100 nanometer, the upper metal grating 1 and the lower metal grating 3 are both aluminum, and their thicknesses are both 60 nanometers. The simulation results show that almost all TE light is reflected, and part of the TE light with a wavelength shorter than 410 nm will be diffracted, and the diffraction efficiency is lower than 20%. TM light with a wave...

Embodiment 2

[0051] Example 2: A visible light band plasmonic polarization beam splitter using a double-layer metal dielectric composite grating, in figure 1 On the basis of the device structure, the upper metal grating 1 and the lower metal grating 3 are respectively covered with an anti-reflection magnesium fluoride dielectric layer with a thickness of 10 nm and a refractive index of 1.2. Reflection, diffraction and transmission spectra obtained from RSOFT simulations, see Figure 4 , the abscissa of the figure is the incident angle, and the unit is degree. The ordinate is the wavelength of the incident light, and the unit is micron. It can be seen from the figure that the reflection of TM is reduced, especially the long-wavelength band reflection is reduced from 10% to 1% at most; at the same time, the transmission is enhanced to 60%, and some wavelengths are increased by five or six times; the diffraction is also enhanced. The spectrum of TE light does not change much. It can be see...

Embodiment 3

[0052] Embodiment 3: A THz-band plasmonic polarization beam splitting device using a double-layer composite metal grating, the widths of the first dielectric grating 2.a and the second dielectric grating 2.b are both half of the period, and the first dielectric grating 2. .a is PMMA (refractive index 1.5), the thickness is 2.5 microns, combined with the attached Figure 5 , Reflection, diffraction, and transmission spectra of a double-layer composite metal grating with a grating period of 8 μm. The duty cycle of the dielectric grating is 0.5, and the thickness of the medium is 25 microns. Each layer of composite metal grating 1 and 3 is composed of chromium-aluminum-chromium, the thickness of aluminum is 1.2 microns, and the thickness of chromium is 10 nanometers. The upper and lower layers of composite metal gratings have the same structure. The role of chromium is to increase the adhesion of metals and media. Simulation results show that the composite metal grating can be ...

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Abstract

The invention discloses a metal grating polarization beam splitter. The metal grating polarization beam splitter consists of a plurality of repeated grating units, wherein each grating unit comprises a first medium and a second medium which are adjacent to each other on left and right sides, upper layer metal positioned on the top of the first medium, lower layer metal positioned at the bottom of the second medium, and a substrate positioned at the bottoms of the lower layer metal and the first medium. TE polarized light cannot be transmitted in a slit and only reflected light exists by controlling the medium slit width to be smaller than the mode cut-off width of TE polarized light of a working wavelength, and only grade 0 and grade + / -1 diffraction of TM polarized light exists in a polarization beam splitting grating by controlling the grating period, thereby forming the polarization beam splitter in which the TE polarized light is reflected and the TM polarized light are diffracted and transmitted. By adopting the metal grating polarization beam splitter, wide-band and large-angle-range reflection / diffraction polarization beam splitting is realized.

Description

Technical field: [0001] This patent relates to the technical field of polarizing beam splitting devices, in particular a wide-spectrum polarizing beam splitting grating based on metal gratings, using surface plasmon waveguide cut-off effect to produce adjustable angles, transverse electric field reflection, and transverse magnetic field diffraction. The utility model belongs to a polarization beam splitting device in the field of optics. Background technique: [0002] Polarized light is widely used in modern optical technologies and applications, such as optical communication, optical storage, and optical sensing. The polarizing beam splitter can split the incident unpolarized light into two beams whose polarization directions are perpendicular to each other. Furthermore, a large-angle, broadband polarizing beam splitter with a wide range of incident angles and a wide operating spectrum is more valuable for practical applications. [0003] Traditional polarizing beam split...

Claims

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Application Information

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IPC IPC(8): G02B6/126G02B6/13
Inventor 叶志成郑君
Owner 厦门市为纳光电科技有限公司
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