Folding-slot antenna structure and manufacturing method thereof

Abstract

The invention provides a folding-slot antenna structure and a manufacturing method thereof. The method is characterized by coating a fluid and low dielectric constant organic dielectric material on a silicon substrate and curing the organic dielectric material to serve as a dielectric substrate of the antenna; producing a folding-slot antenna graph on the dielectric substrate; and etching the silicon substrate at corresponding areas under the folding-slot antenna graph so as to form a medium cavity. The etching method of the medium cavity is characterized by, before producing the antenna graph, performing etching by utilizing low-cost wet process KOH; and after the antenna is produced, etching the rest silicon film by utilizing a DRIE dry method. The folding-slot antenna in the invention helps to overcome the disadvantage of relatively-thin dielectric substrate of a silicon-based integrated antenna; the bandwidth of the antenna is substantially increased and the performance of the antenna is improved; and the bandwidth of the antenna is allowed to increase to above 15%. The manufacturing process is compatible with embedded chip packaging; and the produced antenna can be packaged with the chip, thereby reducing the transmission distance of a signal line and reducing loss. Meanwhile, since the antenna and the chip are integrated together, the reliability of the antenna is improved, the size of the antenna is reduced, and the antenna accords with the trend of modern integrated circuit packaging.

Description

Technical field [0001] The invention relates to an antenna and a manufacturing process thereof, in particular to a structure and a manufacturing method of a folded slot antenna based on low-resistance silicon. Background technique [0002] In the field of wireless communication, the antenna is an indispensable and very important part. Microstrip antenna is a new type of antenna successfully developed in the early 1970s. Compared with commonly used microwave antennas, it has the following advantages: small size, light weight, low profile, conformal to the carrier, simple to manufacture, and low cost; the characteristic of the electrical appliance is that it can obtain a unidirectional wide-lobe pattern, The maximum radiation direction is in the normal direction of the plane, which is easy to integrate with microstrip lines, and it is easy to realize linear polarization or circular polarization. Microstrip antennas of the same structure can form a microstrip antenna array to obta...

AI Technical Summary

Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a folded slot antenna structure and manufacturing method, which is used to solve the problem of thinner dielectric substrates of silicon-based integrated antennas in the prior art

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