Optical element structure and optical element manufacturing process therefor
A technology of optical components and manufacturing methods, applied in the direction of optical components, optics, light guides, etc., can solve the problems of increased possibility of micro-lens fusion
Active Publication Date: 2016-06-29
TAIWAN SEMICON MFG CO LTD
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- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The thermal reflow process used to make thinner microlenses typically uses higher temperatures, leading to an increased likelihood of microlens fusion
[0008] Another area of concern is optical interconnects and optical waveguides
Method used
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Embodiment 1
[0090] Embodiment 1: In a manufacturing process for making an optical element, the process includes forming a substrate, a set of blocks and an overlying coating. The set of blocks is formed on a substrate. An overlying coating is formed over the set of blocks and the substrate by a deposition scheme.
Embodiment 2
[0091] Embodiment 2: In the process according to the above embodiments, the optical element is one of a microlens and a waveguide.
Embodiment 3
[0092] Embodiment 3: In the process according to the above embodiment 1 or 2, the deposition scheme is one selected from the group consisting of spin coating scheme, atomic layer deposition scheme and vapor phase based deposition scheme.
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The invention provides an optical element structure and a manufacturing process of the optical element structure. The optical element fabrication process includes providing a substrate with protrusions formed thereon; and forming an overlying coating over the protrusions and the substrate by a deposition scheme to form the optical element.
Description
technical field [0001] The present invention relates to semiconductor structures and fabrication processes for the semiconductor structures. More particularly, the present invention relates to a semiconductor structure having an optical element structure formed thereon and an optical element manufacturing process for forming the optical element structure. Background technique [0002] Microlenses are widely used in various fields, such as microelectromechanical systems (MEMS), image sensors (including charge-coupled device (CCD) image sensors, complementary metal-oxide semiconductor (CMOS) image sensors), optoelectronic devices, and photonic devices. [0003] Typically, microlenses are used to direct light to the photosensitive element, and microlenses are often used as focusing elements. A microlens is a small lens formed on a photosensitive element above a semiconductor substrate. Because light passes through the microlenses, it is important to precisely shape the microl...
Claims
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IPC IPC(8): G02B6/136
CPCG02B6/136G02B3/0012G02B3/0043B05D5/06G02B3/00
Inventor 曾俊豪郭英颢陈海清包天一
Owner TAIWAN SEMICON MFG CO LTD