Method for producing transparent conducting film glass
A transparent conductive film and glass technology, applied in the field of glass production and manufacturing, can solve the problems of difficult manufacturing of coating equipment, unstable tin bath conditions, waste of precursor gas, etc., to achieve good molding quality, reduce energy consumption and tin liquid Effects of loss and reduction in film formation temperature
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[0027] A kind of method for producing transparent conductive film glass provided by the invention comprises the following steps:
[0028] (1) In the annealing kiln of the float glass production line, the width of the glass plate is 3500mm, and the pulling speed is 360m / h. The shielding layer precursor containing silane and nitrous oxide is passed into the temperature of 470℃ with nitrogen as the carrier. on the float glass surface. The silane is 3-12mol%, dinitrogen oxide is 20-70%, and the rest is nitrogen. The total gas flow rate is 37.5m 3 / h.
[0029] The wavelength of the ArF excimer laser beam is 193nm, and the laser intensity is 40-90W / cm 2 , The frequency is 100Hz, and the lower boundary of the horizontal direction is precisely defined by the mask plate, so that the distance between the lower boundary of the laser beam and the surface of the glass ribbon is controlled within 1 mm and the parallel incident is made to photodissociate nitrous oxide to generate excited s...
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