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Crystal boat for semiconductor furnace tube

A semiconductor and furnace tube technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as improving thermal stress deformation of wafers and chromatic aberration defects, avoid chromatic aberration defects, improve yield, Reduce the effect of deformation

Active Publication Date: 2017-01-25
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The above-mentioned two patents are the closest to the prior art of the present invention. They both improve the yield rate of wafers by changing the structure of the wafer boat to reduce wafer boat particles, but neither mentions the improvement of wafer thermal stress deformation and chromatic aberration defects. method

Method used

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  • Crystal boat for semiconductor furnace tube
  • Crystal boat for semiconductor furnace tube
  • Crystal boat for semiconductor furnace tube

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Embodiment Construction

[0026] The invention provides a crystal boat for a semiconductor furnace tube, which can be applied to processes with technology nodes of 90nm, 65 / 55nm, 45 / 40nm, 32 / 28nm, greater than or equal to 130nm, and less than or equal to 22nm; it can be applied to the following technical platforms : Logic, Memory, RF, HV, Analog / Power, MEMS, CIS, Flash and eFlash.

[0027] The core idea of ​​the present invention is to reduce the deformation of the wafer under high temperature conditions by increasing the area of ​​the supporting feet in the wafer boat that are in contact with the wafer, and the specific implementation method is as follows:

[0028] A number of horizontal support feet are set in the above-mentioned crystal boat, and at least three support feet are on the same horizontal plane at the horizontal position of each wafer in the wafer boat, and one end of each support foot is fixed on the inner wall of the wafer boat above; a support plate is provided on the end of each supp...

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Abstract

The invention provides a boat of a semiconductor furnace tube. The boat is internally provided multiple horizontal supporting legs, at least three of the supporting legs are placed in the same horizontal plane, each supporting leg is fixed to the inner wall of the boat, and the end, which is not connected to the inner wall of the boat, of the supporting leg is provided with a support disk. The surface area of each support disk is greater than that of a slotted pin where the support disk is placed. The contact stressed area between a wafer and the boat can be increased, thereby decreasing deformation of the wafer at high temperature, and avoiding the defect of aberration of the wafer.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a crystal boat for a semiconductor furnace tube. Background technique [0002] With the advancement of science and technology, semiconductor electronic products have been applied to various fields of social life, and these semiconductor electronic products all have semiconductor chips. It can be seen that semiconductor chips have a very significant importance in today's life. [0003] In the manufacturing process of semiconductor chips, the furnace tube is an indispensable equipment. For example, the diffusion process using the furnace tube is a basic process. In the diffusion process, many wafers are first placed on a wafer boat, and then The wafer boats are placed in the furnace tube for batch manufacturing. For semiconductor wafers, the quality and quantity of wafers manufactured by one device in the same period greatly affect the yield and manufacturing cost of sem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673H01L21/687
CPCH01L21/6732
Inventor 张召王智苏俊铭张旭昇
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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