A microwave phase shifter based on MEMS

A technology of microwave phase shifter and micro-mechanical electronics, which is applied in the direction of waveguide devices, generators/motors, TV system components, etc., can solve the problems of complex structure, complex control, and complex process of phase shifters, and achieve structural Simple, simple process, simple control effect

Active Publication Date: 2017-05-10
CHENGDU CORPRO TECH CO LTD
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Problems solved by technology

Since the MEMS bridge only has two states, the upper and lower states, the phase shifter in the prior art can only realize a limited phase state. If multiple phase states are to be realized, multiple control ports are required, which not only complicates the control, but also makes the phase shifter The structure becomes complicated. During processing, silicon surface processing technology is used, and the process is complicated

Method used

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  • A microwave phase shifter based on MEMS
  • A microwave phase shifter based on MEMS
  • A microwave phase shifter based on MEMS

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Embodiment Construction

[0022] The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.

[0023] like figure 1 , figure 2 As shown, a microwave phase shifter based on micro-mechanical electronic technology includes a distributed parameter transmission line 1, a capacitor driver 3 and a dielectric substrate 2, and the transmission line 1 is arranged on the upper end of the dielectric substrate 2. The distributed parameter transmission line 1 includes a signal line 7, a first ground line 10, a second ground line 4 and an interdigitated capacitor 8, the signal line 7 is arranged between the first ground line 10 and the second ground line 4, the two of the signal line 7 There are signal input terminals 6 and signal output terminals 5 respectively, and an interdigitated capacitor 8 is provided between the signal line 7 and the gro...

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Abstract

The invention discloses a microwave phase shifter based on a micro-mechano-electronic technology. The microwave phase shifter comprises a distribution parameter transmission line (1), capacitor drivers (3) and a dielectric substrate (2). The capacitor drivers (3) are arranged on the dielectric substrate (2). One end of each capacitor driver (3) is connected with a corresponding grounding wire of the distribution parameter transmission line (1) through a U-shaped beam (9), the other end of each capacitor driver (3) is connected with a driving power supply, interdigital capacitors (8) are evenly loaded between a signal wire (7) and the grounding wires, and therefore the distribution parameter transmission line (1) is formed. The microwave phase shifter has the advantages that electrostatic force is generated through the interdigital capacitors, the grounding wires of the distribution parameter transmission line shift, the capacitance of the interdigital capacitors changes correspondingly, the phase of a signal also changes, the phase is changed continuously and an infinite number of phase states are realized when driving voltage continuously changes, and the microwave phase shifter is simple in structure and convenient to control.

Description

technical field [0001] The invention relates to the field of micro-electromechanical, in particular to a microwave phase shifter based on micro-mechanical electronic technology. Background technique [0002] Phase shifters can adjust the phase of waves, and are widely used in phased array radar, missile attitude control, communication, instrumentation and other fields. The use of phase shifters can form phased array antennas, balanced mixers, power dividers and other microwave functional circuits. Its working principle is different according to different configurations. For example, in transistor circuits, a control signal can be added to the input to control the phase shift; in some circuits, the delay of the resistance-capacitance circuit is used to achieve phase shift; Can use the internal timer to achieve the purpose of phase shifting. [0003] The digital MEMS electronic phase shifter in the prior art changes the distributed parameter capacitance of the distributed pa...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): H01P1/18B81B7/02
Inventor黄绪国
OwnerCHENGDU CORPRO TECH CO LTD