Radio frequency plasma chamber meeting mechanism that negative hydrogen ions are generated through plasmas
A technology of plasma and negative hydrogen ions, applied in the field of plasma chambers
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[0014] figure 1 , 2 A structural diagram of a plasma chamber for generating negative hydrogen ions is shown. In the figure, the vacuum chamber is composed of a discharge source area cavity 10 , a discharge source area chamber sealing cover 5 , a diffusion area cavity 15 , a diffusion area cavity sealing cover 2 and a bottom plate 19 . Wherein, the chamber of the discharge source area is located on the top of the diffusion chamber, and then fixed on the experimental platform 17 . A discharge coil 11 is wound around the cavity 10 of the discharge source area and two magnetic field coils 4 are placed, and a top observation and measurement window 7, a first air inlet 8, a pre-ionization bias table 9 and a metal baffle shaft are arranged at the top To the position adjustment mechanism 6. Diffusion zone cavity 15 is provided with 6 sidewall observation and measurement windows 14 and second magnetic field coil 1, and a second air inlet 3 is provided on the top cover. The bottom p...
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