Dual-pipeline switching gas-filling device of polycrystalline ingot furnace and control method thereof
An inflatable device, polycrystalline ingot technology, applied in the direction of polycrystalline material growth, chemical instruments and methods, crystal growth, etc., to ensure the normal growth of crystals, to ensure the effect of stable gas supply
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[0012] The specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing:
[0013] A double-pipe conversion charging device for a polycrystalline ingot furnace, such as figure 1 As shown, it includes the first manual valve 1, the second manual valve 2, the third manual valve 3, the first flow meter 4, the fourth manual valve 5, the fifth manual valve 6, the second flow meter 7, the main airway 8 and auxiliary airway 9, the first manual valve 1, the second manual valve 2, the third manual valve 3 and the first flowmeter 4 are installed in series on the main airway 8, and the first flowmeter 4 is set on the second hand Between the movable valve 2 and the third manual valve 3, the main airway 8 is equipped with the inlet end of the first manual valve 1 and communicates with the argon tank 10, and the main airway 8 is equipped with the gas outlet end of the third manual valve 3 and The ingot furnace 11 is connected, the fourth ...
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