Biochemical sensor based on polymer long-period waveguide optical grating and preparation method thereof

Abstract

The invention discloses a biochemical sensor based on a polymer long-period waveguide optical grating and a preparation method thereof. The biochemical sensor comprises a silicon substrate layer, a lower covering layer, a core layer and an upper covering layer which are overlapped sequentially from bottom to top, wherein the upper covering layer is provided with a liquid channel; and the core layer comprises a straight waveguide, and a first long-period optical grating and a second long-period optical grating which are connected with one side of the straight waveguide and stretch into the liquid channel. Furthermore, the preparation method adopts a mask plate I and a mask plate II, and combines a magnetron sputtering process, a photoetching process, a wet-process etching process, a dry-process etching process and the like, so that the biochemical sensor can be conveniently and rapidly prepared; and compared with a traditional biochemical sensor, the biochemical sensor disclosed by the invention has the advantages of small size, simple structure, high sensitivity, rapid detection, low cost, convenience for integration and detection diversity.

Description

technical field [0001] The invention belongs to the technical field of sensing, and in particular relates to a biochemical sensor based on a polymer long-period waveguide grating and a preparation method thereof. Background technique [0002] In response to the increasingly serious threat of biochemical terrorist attacks and the large demand in the fields of medical diagnosis and environmental monitoring, optical biochemical sensors have attracted more and more attention, which provides an unprecedented development opportunity for the current research on biochemical sensors, based on new principles Sensor devices of new technologies and new technologies present obvious growth trends and development potentials in basic research and applications. [0003] In addition to the advantages of high sensitivity, fast response, and strong anti-electromagnetic interference, optical biochemical sensors can also work in high-temperature, high-humidity, flammable and explosive environment...

AI Technical Summary

Problems solved by technology

At present, the qualitative detection in biochemical detection is limited to the specific sensitive membrane with high cost. In the quantitative detection of aqueous liquid, it is necessary to avoid the absorption band of water, so the bandwidth is limited.

Images