Alignment assembly and method for aligning rotation axis of rotary table laser direct writing device with direct writing optical axis

Abstract

A component that aligns the rotating shaft of a rotary table-type laser direct writing device with the direct writing optical axis. The direct writing device includes a laser source; the laser path is sequentially provided with a laser modulator, a first mirror, a second mirror and a microscope The objective lens, the laser beam modulated by the laser modulator is reflected by the first and second mirrors and incident on the microscope objective lens; the rotary table, the table surface of the rotary table is perpendicular to the direct writing optical axis. The alignment assembly includes: a flat piece, one side of which is provided with a metal film, the flat piece is fixed on the table top of the rotary table, and the metal film faces the microscope objective lens; and a digital imaging system, including an illumination source, a visible light splitter, an image sensor, a display , where the visible light from the illumination source is reflected by the light splitter and then transmitted through the second reflector and incident on the metal film through the microscope objective lens, and the visible light reflected by the metal film enters through the microscope objective lens, the second reflector, and the visible light beam splitter The image sensor, and the display displays images from the image sensor.

Description

technical field [0001] Embodiments of the present invention belong to the field of laser micro-nano processing, and in particular, relate to an alignment component and method for aligning a rotation axis of a rotary table laser direct writing device with a direct writing optical axis. [0002] technical background [0003] Laser micro-nano direct writing technology is a digital processing technology, which has the advantages of high processing precision, complex shape and wide range of processing materials. The rotary table laser direct writing technology under the cylindrical coordinate system has the advantages of high processing efficiency, large processing range and high processing precision compared with scanning galvanometer processing and sample table piezoelectric or linear motor raster scanning processing. It is suitable for the processing of centrosymmetric micro-nano structures and has become an important technical means for making diffractive micro-optical element...

AI Technical Summary

Problems solved by technology

If there is an alignment error, errors will be introduced into parameters such as the scanning radius of the micro-relief structure during the processing of the optical element, which will eventually have a great impact on the quality of the optical element

[0004] At present, there are mainly the following technologies to solve the alignment between the rotating shaft of the laser direct writing machine and the direct writing optical axis: Rotate the grating ruler, observe the movement of the grating stripes through the imaging system or use the CCD to monitor the light and dark changes of the laser spot reflected by the grating to judge the two axes Whether it is aligned or not, the disadvantage is that the alignment accuracy is difficult to improve due to the influence of the grating period, and the operation is more complicated; using a photoelectric scanning microscope to align the two axes, even if the error can be less than 0.1μm, the operation is complicated and the cost is high; the use of monitoring rotation The laser reflected by the 10-degree wedge is aligned to the two axes. The disadvantage is that the detection accuracy is greatly affected by the surface of the wedge, and it is very difficult to make a high-precision wedge-shaped reflective substrate.

[0005] The above methods can align the shafts based on air bearings with at least sub-micron precision, but it is difficult to visually evaluate the alignment during the alignment process, and the operation is complicated; The runout in the radial direction and the radial direction is relatively large, and it is difficult to judge the alignment situation by using the above method, resulting in limited applicability of the above method

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