An X-ray grazing incidence lens long-distance light source alignment device and its alignment method
An alignment device and grazing incidence technology, applied in the field of X-ray optics, can solve the problems of low alignment device accuracy, long time-consuming alignment device, shortened alignment cycle, etc., and achieves excellent optical axis alignment accuracy, easy implementation, The effect of shortening the alignment cycle
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[0037] The present invention will be further described below in conjunction with accompanying drawing description and specific embodiment:
[0038] like Figure 1~3 As shown, an X-ray grazing incidence lens long-distance light source alignment device includes a beam expander laser 1, a two-axis attitude adjustment frame 2, a lifting and translation tripod 3, an aperture stop 4, a four-degree-of-freedom translation and rotation table 5, a grazing The incident lens 6 and the X-ray source 7; the beam expander laser 1 is installed on the biaxial attitude adjustment frame 2 for adjusting the pitch and deflection of the beam expander laser 1, as the grazing incidence lens 6 is aligned with the optical axis of the X-ray source 7 at a long distance The benchmark; the two-axis attitude adjustment frame 2 is installed on the lifting and translation tripod 3 for supporting and adjusting the vertical and horizontal movement of the beam expander laser 1, and the grazing incident lens 6 is ...
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