Spherical mirror and plane mirror surface shape error absolute detection method
A technology of absolute detection and surface shape error, applied in measuring devices, instruments, optical devices, etc., can solve problems such as difficult to achieve high resolution and low noise transfer coefficient at the same time
Active Publication Date: 2015-10-14
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0004] The present invention provides an absolute detection method based on rotation and translation detection in order to solve the problem that the existing absolute detection methods of spherical mirrors and plane mirrors are difficult to achieve high resolution and low noise transfer coefficient at the same time
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[0036] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0037] like figure 1 As shown, the interferometer 1 is usually a commercial Fizeau interferometer, the reference mirror 2 is a transmitted spherical wave lens or a transmitted plane wave lens installed on the interferometer 1, the inspected mirror 3 is a spherical mirror or a plane mirror, and the inspected mirror 3 is aligned with The reference mirror 2 meets the requirements of interference detection, the turntable 4 is placed under the inspected mirror 3 to realize the 360° rotation of the inspected mirror, and the five-dimensional adjustment table 5 is placed under the turntable 4 to translate and tilt the inspected mirror 3 .
[0038] like figure 2 As shown, the implementation steps of the absolute detection method of spherical mirror and plane mirror surface error are as follows:
[0039] Step 1, use the interferometer 1 and the reference mirror 2 on...
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The invention provides a spherical mirror and plane mirror surface shape error absolute detection method, belongs to the technical field of optical interference measurement, and aims at solving problems that high spatial resolution and low noise transfer coefficient are difficult to realize simultaneously in spherical mirror and plane mirror surface shape error absolute detection. Wave surface average and wave surface subtraction of multiple rotating position detection results are utilized to realize high-resolution absolute detection of most rotating asymmetric surface shape errors; a finite difference equation group is formed by wave surface subtraction of two translation positions and arbitrary rotating position detection results, and high-resolution absolution detection of rotating symmetric surface shape errors and the rest rotating asymmetric surface shape errors by solving the difference equation group through a wave surface reconstruction algorithm based on the least square fitting principle; and the translation amount in translation detection is enhanced, and the wave surface of the detected mirror surface shape error is decomposed into multiple mutually intersected sub-wave surfaces to perform wave surface reconstruction respectively so that the noise transfer coefficient of the wave surface reconstruction algorithm can be reduced.
Description
technical field [0001] The invention relates to an absolute detection method for surface shape errors of spherical mirrors and plane mirrors. The method has the characteristics of high spatial resolution and low noise transfer coefficient, can be applied to the field of high-precision detection of surface shape errors of spherical and plane optical elements, and belongs to optical The field of interferometry technology. Background technique [0002] Modern lithography technology requires that the root mean square error of optical elements such as plane, spherical and aspheric surfaces in the lithography objective lens system reach sub-nanometer level. The lithography objective lens system puts forward extremely high requirements on the processing and detection technology of spherical mirrors and flat mirrors, and the absolute detection technology of optical element surface error is the premise to realize the sub-nanometer processing accuracy of optical elements. At the same...
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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 苗亮马冬梅金春水刘钰张文龙张海涛于杰
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI