Absolute detection method of spherical mirror and plane mirror surface shape error
An absolute detection and spherical mirror technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve problems such as difficult to achieve high resolution and low noise transfer coefficient at the same time, achieve simple absolute detection process, reduce noise transfer coefficient, translation A large amount of effect
Active Publication Date: 2017-07-14
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0004] The present invention provides an absolute detection method based on rotation and translation detection in order to solve the problem that the existing absolute detection methods of spherical mirrors and plane mirrors are difficult to achieve high resolution and low noise transfer coefficient at the same time
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[0036] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0037] Such as figure 1 As shown, the interferometer 1 is usually a commercial Fizeau interferometer, the reference mirror 2 is a transmitted spherical wave lens or a transmitted plane wave lens installed on the interferometer 1, the inspected mirror 3 is a spherical mirror or a plane mirror, and the inspected mirror 3 is aligned with The reference mirror 2 meets the requirements of interference detection, the turntable 4 is placed under the inspected mirror 3 to realize the 360° rotation of the inspected mirror, and the five-dimensional adjustment table 5 is placed under the turntable 4 to translate and tilt the inspected mirror 3 .
[0038] Such as figure 2 As shown, the implementation steps of the absolute detection method of spherical mirror and plane mirror surface error are as follows:
[0039] Step 1, use the interferometer 1 and the reference mirro...
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The invention relates to an absolute detection method for surface shape errors of spherical mirrors and plane mirrors, which belongs to the technical field of optical interferometry. In order to solve the problem that it is difficult to simultaneously achieve high spatial resolution and low noise transfer coefficient during the absolute detection of surface shape errors of spherical mirrors and plane mirrors, multiple rotation position detection methods are used. The wave surface average and wave surface subtraction of the results realize the high-resolution absolute detection of most rotational asymmetric surface errors; the wave surface subtraction of the detection results of two translation positions and arbitrary rotation positions is used to form a finite difference equation system, and the least square method is used to The wave surface reconstruction algorithm based on the fitting principle solves the difference equations to realize the high-resolution absolute detection of the rotationally symmetric surface error and the remaining rotationally asymmetrical surface error; The error wavefront is decomposed into multiple intersecting sub-wavefronts for wavefront reconstruction, thereby reducing the noise transfer coefficient of the wavefront reconstruction algorithm.
Description
technical field [0001] The invention relates to an absolute detection method for surface shape errors of spherical mirrors and plane mirrors. The method has the characteristics of high spatial resolution and low noise transfer coefficient, can be applied to the field of high-precision detection of surface shape errors of spherical and plane optical elements, and belongs to optical The field of interferometry technology. Background technique [0002] Modern lithography technology requires that the root mean square error of optical elements such as plane, spherical and aspheric surfaces in the lithography objective lens system reach sub-nanometer level. The lithography objective lens system puts forward extremely high requirements on the processing and detection technology of spherical mirrors and flat mirrors, and the absolute detection technology of optical element surface error is the premise to realize the sub-nanometer processing accuracy of optical elements. At the same...
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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 苗亮马冬梅金春水刘钰张文龙张海涛于杰
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI