Structure with arranged gaps and measuring method
A measurement method and structure technology, applied in the direction of measuring device, scattering characteristic measurement, thin material processing, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0044] Example 1: R=0.2μm
Embodiment 2
[0045] Example 2: R=0.4μm
[0046] Electromagnetic wave pulses at frequencies in the range of 88 to 108 THz were irradiated to the void arrangement structures 1 of Examples 1 and 2 and Comparative Example, and the transmittance-frequency characteristics of electromagnetic waves were measured. As a result of this, one gets figure 2 The results shown.
[0047] according to figure 2 It can be seen that when the curvature of the above-mentioned curved portion 2 changes, the frequency positions of the trough waveform arrows P1 to P3 appearing in the transmittance-frequency characteristic curve change. exist figure 2 , the minimum point of the trough waveform shown by arrow P1 is at 96.245 THz, the minimum point of the trough waveform shown by arrow P2 is at 97.966 THz, and the minimum point of the trough waveform shown by arrow P3 is at 101.878 THz.
[0048]Therefore, it can be seen that changing the shape of the curved portion 2 can change the frequency position of the trou...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 