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Structure with arranged gaps and measuring method

A measurement method and structure technology, applied in the direction of measuring device, scattering characteristic measurement, thin material processing, etc.

Inactive Publication Date: 2015-11-18
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, if there is a trough waveform in the passband, the degree of decrease in the transmittance at the trough waveform can be confirmed.

Method used

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  • Structure with arranged gaps and measuring method
  • Structure with arranged gaps and measuring method
  • Structure with arranged gaps and measuring method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Example 1: R=0.2μm

Embodiment 2

[0045] Example 2: R=0.4μm

[0046] Electromagnetic wave pulses at frequencies in the range of 88 to 108 THz were irradiated to the void arrangement structures 1 of Examples 1 and 2 and Comparative Example, and the transmittance-frequency characteristics of electromagnetic waves were measured. As a result of this, one gets figure 2 The results shown.

[0047] according to figure 2 It can be seen that when the curvature of the above-mentioned curved portion 2 changes, the frequency positions of the trough waveform arrows P1 to P3 appearing in the transmittance-frequency characteristic curve change. exist figure 2 , the minimum point of the trough waveform shown by arrow P1 is at 96.245 THz, the minimum point of the trough waveform shown by arrow P2 is at 97.966 THz, and the minimum point of the trough waveform shown by arrow P3 is at 101.878 THz.

[0048]Therefore, it can be seen that changing the shape of the curved portion 2 can change the frequency position of the trou...

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Abstract

A void-arranged structure having a plurality of void sections that penetrate from a first principal surface toward a second principal surface. An opening shape of the void section includes at least one curved corner.

Description

technical field [0001] The present invention relates to a void arrangement structure and a measurement method for measuring an object to be measured by irradiating electromagnetic waves to the void arrangement structure holding the object to be measured. Background technique [0002] Conventionally, there is known a method of measuring the object to be measured by arranging the object to be measured in a gap arrangement structure and irradiating it with electromagnetic waves. For example, an example of such a measurement method is disclosed in Patent Document 1 below. In Patent Document 1, a void arrangement structure composed of a mesh-shaped conductor plate or the like is used. The object to be measured is held on the main surface of the void arrangement structure. Electromagnetic waves are irradiated to the main surface of the void arrangement structure. Electromagnetic waves transmitted through the void arrangement structure are detected. The frequency characteristic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/01G01N21/3581
CPCG01N21/47G01N21/03G01N21/3581Y10T428/24298Y10T428/24306G01N2021/0339
Inventor 神波诚治近藤孝志
Owner MURATA MFG CO LTD