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A kind of incident angle insensitive color filter and its preparation method

A technology of incident angle and optical filter, applied in optics, optical components, instruments, etc., to achieve the effects of simple preparation, reduced cost, and low cost

Active Publication Date: 2017-09-12
上海高能煜镀科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Optical filters based on the MDM structure have been proven to be angle-insensitive. However, due to the requirement that the dielectric constant of the dielectric film and the metal film material have opposite positive and negative requirements in the working band, the commonly used dielectric film material can only work in a single layer as a dielectric layer. resonance wavelength

Method used

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  • A kind of incident angle insensitive color filter and its preparation method
  • A kind of incident angle insensitive color filter and its preparation method
  • A kind of incident angle insensitive color filter and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～5

[0038] The metal film material is Ag; the dielectric film material is silicon-rich silicon oxide (SiOx)

[0039] Such as figure 1 As shown, a color filter that is not sensitive to the incident angle is composed of a substrate 1, and a metal film 2 (Ag), a dielectric film 3 (silicon-rich silicon oxide (SiOx)) and a metal film 4 ( Ag) composition, the dielectric constant of the dielectric film and the metal film material in the working band are opposite in positive and negative, and the absolute value is the same, based on the characteristics of adjustable refractive index of SiOx, the central wavelength of the color filter that is not sensitive to the incident angle Can cover the entire visible light band.

[0040] A method for preparing a color filter that is not sensitive to an incident angle, comprising the following steps,

[0041] 1) For the color filter expected to have a specific central wavelength, the corresponding thickness of the dielectric film SiOx, the thickness...

Embodiment

[0046] Embodiment parameter is as follows table 1:

[0047] Table 1

[0048]

[0049] Angle-insensitive filters with 5 different resonance wavelengths can be produced according to the parameters shown in the table above.

[0050] Carry out P polarized light transmission experiment to the optical filter that embodiment 1-5 prepares respectively, the P polarized light transmission spectrogram that obtains sees Figure 3-7 ,in image 3 It is the P polarized light transmission spectrum figure corresponding to embodiment 1, Figure 4 It is the P polarized light transmission spectrum figure corresponding to embodiment 2, Figure 5 It is the P polarized light transmission spectrum figure corresponding to embodiment 3, Figure 6 It is the P polarized light transmission spectrum figure corresponding to embodiment 4, Figure 7 It is the P polarized light transmission spectrum figure corresponding to embodiment 5;

[0051] Carry out S polarized light transmission experiment to t...

Embodiment 6-11

[0054] see Figure 13 , choose silicon-rich silicon nitride SiNy as the dielectric thin layer material; Ag metal thin film material;

[0055] By using a method similar to that of Examples 1-5 and carrying out Examples 6-11 according to the parameters shown in Table 2, another 6 angle-insensitive filters with different resonance wavelengths can be produced.

[0056] Table 2

[0057]

[0058] Carry out P polarized light transmission experiment to the optical filter that embodiment 6-11 prepares respectively, the obtained P polarized light transmission spectrogram sees Figure 14-19 ,in Figure 14 It is the P polarized light transmission spectrum figure corresponding to embodiment 6, Figure 15 It is the P polarized light transmission spectrum figure corresponding to embodiment 7, Figure 16 It is the P polarized light transmission spectrum figure corresponding to embodiment 8, Figure 17 It is the P polarized light transmission spectrum figure corresponding to embodiment...

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Abstract

The invention discloses a color filter which is not sensitive to an incident angle and a preparation method thereof, wherein the filter comprises a base on which a metal thin film, a dielectric thin film and a metal thin film are sequentially arranged, and the three-layer thin films form a resonant structure; The dielectric thin film material is selected from silicon-rich silicon oxide SiOx or silicon-rich silicon nitride SiNy; wherein the value ranges of x and y are respectively: 0<x<2, 0<y<4 / 3. The preparation method of the color filter which is not sensitive to the incident angle of the invention has the advantages of simple preparation, low cost and convenient large-scale and batch production. Therefore, the invention is expected to be widely used in the fields of liquid crystal display, color printing, sensor detection and anti-counterfeiting.

Description

technical field [0001] The invention relates to an optical element, in particular to a color filter insensitive to an incident angle and a preparation method thereof, which can be applied to the fields of liquid crystal display, color printing, sensory detection, anti-counterfeiting and the like. Background technique [0002] Angle-insensitive color filters are widely used in image sensors, liquid crystal displays, and solar cells. Color filters have evolved from chemical dye filters and traditional dielectric thin film filters to today's microstructure grating filters. Although their performance has been continuously improved, they still have obvious deficiencies. Chemical dye filters have disadvantages such as poor quality and fading under long-term ultraviolet light irradiation. Traditional dielectric thin film filters do not have angle tolerance characteristics, and spectral blue shift occurs when light is obliquely incident. Electron beam exposure technology is used in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/28
Inventor 沈伟东毛克宁杨陈楹章岳光刘旭
Owner 上海高能煜镀科技有限公司
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