Coating device and its improvement method
A coating device and coating technology, which is applied to the device and coating of the surface coating liquid, can solve the problems of cost increase, inability to set up the coating device and the mobile mounting device, and the loading and unloading of the substrate, so as to prevent Effect of cost increase
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[0046] Hereinafter, a preferred embodiment of the coating device and its improvement method according to the present invention will be described in detail with reference to the drawings. figure 1 It is a perspective view which shows the coating apparatus (For example, it is called a table coater (registered trademark in Japan) etc.) of this embodiment.
[0047] The coating device 1 of the present embodiment generally moves a nozzle unit having a nozzle 7 for spraying a coating liquid relative to a substrate 3 as a coating target placed on a stage 4, and sprays the coating liquid from the nozzle 7. The coating device 1 that coats the coating liquid on the substrate 3 is transferred from the outside of the coating device 1 to the external transfer device 14 near the workbench 4 (shown in FIG. image 3 as well as Figure 4 Middle) and the support arm 10 which supports and transfers the board|substrate 3 between the table 4 is provided in the nozzle unit.
[0048] The external t...
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